Traceable and long-range grating pitch measurement with picometer resolution

Xie, Yongfang; Jia, Wei; Zhao, Dong; Ye, Zong-Hao; Sun, Peng; Xiang, Changcheng; Wang, Jin; Zhou, Changhe

doi:10.1016/j.optcom.2020.126316

Cited by 6 publications

(7 citation statements)

References 23 publications

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“…d 1 is a constant, and thus, only solving for the phase difference in dual-grating is required. Subsequently, the spacing of the grating to be calibrated can be calculated by Equation (5).…”

Section: Principle Of Dual-grating Homodyne Interferometer Calibrationmentioning

confidence: 99%

“…d is a constant, and thus, only solving for the phase difference in dual-grating is required. Subsequently, the spacing of the grating to be calibrated can be calculated by Equation (5). From the above equation, it can be inferred that the accuracy of the spacing measuring system primarily depends on the extraction of the phase difference in dual-grating.…”

Section: Principle Of Dual-grating Homodyne Interferometer Calibrationmentioning

confidence: 99%

“…Grating spacing calibration is the pivotal technology for meeting the high-precision positioning demands of nanoscale measurement technology, and has been widely used in micro/nanofabrication, precision manufacturing, microelectronics, and other fields rooted in nanotechnology research [1]. Common methods for grating spacing calibration include long trace profiler (LTP) [2][3][4], scanning reference grating (SRG) [5][6][7], Atomic Force Microscopy (AFM), and grating diffraction [8][9][10]. LTP enables the non-contact full-range spacing measurement of gratings, but is characterized by its high cost and susceptibility to occlusion and eccentricity effects.…”

Section: Introductionmentioning

confidence: 99%

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Research on Dual-Grating Spacing Calibration Method Based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise Combined with Hilbert Transform

Zhu,

Sun,

Guan

et al. 2024

Photonics

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The paper proposes a method for the calibration of spacing in dual-grating based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise (ICEEMDAN) combined with Hilbert Transform (HT), referred to as Multiple ICEEMDAN-HT. This method addresses the potential impact of nonlinear factors on phase extraction accuracy, consequently on ranging precision in the homodyne interference of the dual-grating. Building upon the ICEEMDAN algorithm, the signal undergoes iterative decomposition and reconstruction using the sample entropy criterion. The intrinsic mode functions (IMFs) obtained from multiple iterations are then reconstructed to obtain the complete signal. Through a simulation and comparison with other signal decomposition methods, the repeatability and completeness of signal reconstruction by Multiple ICEEMDAN are verified. Finally, an actual dual-grating ranging system is utilized to calibrate the spacing of the planar grating. Experimental results demonstrate that the calibration relative error of the Multiple ICEEMDAN-HT phase unwrapping method can be reduced to as low as 0.07%, effectively enhancing the signal robustness and spacing calibration precision.

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Section: Principle Of Dual-grating Homodyne Interferometer Calibrationmentioning

confidence: 99%

Section: Principle Of Dual-grating Homodyne Interferometer Calibrationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Research on Dual-Grating Spacing Calibration Method Based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise Combined with Hilbert Transform

Zhu,

Sun,

Guan

et al. 2024

Photonics

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show abstract

“…With the continuous progress in high-end manufacturing, precision measurement technology [1] as well as metamaterials [2][3][4] are being developed more and more rapidly. At present, the commonly used ultra-precision measurement methods include scanning tunneling microscope (STM) [5][6][7], optical fiber displacement sensor [8,9], laser interferometer method [10][11][12][13][14] and grating measurement method [15][16][17][18]. Among them, the laser interferometer method uses the laser wavelength as the measurement standard, which is greatly affected by the humidity, temperature and air pressure changes in the use environment [19].…”

Section: Introductionmentioning

confidence: 99%

Polarization-insensitive high-efficiency two-dimensional metal-dielectric grating by nanodisks arrays

Huang¹,

Wang²

2021

Phys. Scr.

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In this paper, a two-dimensional (2D) reflective grating with nanodisks arrays (NDA) is described, which is capable of achieving high-efficiency and polarization-insensitive output of (−1, 0) order. The proposed grating has been optimized by the finite element method (FEM) at a central wavelength of 780 nm under Littrow mounting, where the grating achieves diffraction efficiencies of 98.01% and 97.54% at the (−1, 0) order for transverse electric (TE) and transverse magnetic (TM) polarizations, respectively. In addition, the extinction ratios of TE and TM polarizations are 33.01 dB and 35.74 dB, respectively. The electric field distribution, wavelength bandwidth, angular bandwidth and fabrication tolerance of the 2D grating are analyzed in detail. The analysis shows that the proposed grating offers a significant improvement in wavelength (bandwidth of 14 nm) and angular (bandwidth of 6.4°) bandwidths compared to previously reported 2D gratings. At the same time, the tolerance analyses demonstrate the feasibility and advantages of NDA grating in practical manufacturing processes. The results are very helpful in understanding and designing 2D gratings, and the proposed grating has great application potential in 2D grating measurement system (GMS).

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“…However, this method is not suitable for the evaluation of the whole length of a scale grating due to the limited measurement throughput. On the other hand, a method utilizing the laser diffraction, in which the period of pattern structure can be evaluated by the angle of diffraction of a diffracted laser beams emanated from the grating surface under evaluation, is a promising one for the evaluation of the whole length of a scale grating [8][9][10][11][12][13]. Although the measurand capable of being evaluated in this method is limited to a mean of the grating period over the area where the measurement laser beam is irradiated (namely, this method is an indirect method for measurement of the pitch of a scale grating), it is suitable for the calibration of large area grating patterns due to its high measurement throughput and non-contact measurement apparatus.…”

Section: Introductionmentioning

confidence: 99%

In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser

et al. 2021

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Major modifications are made to the setup and signal processing of the method of in-situ measurement of the pitch of a diffraction grating based on the angles of diffraction of the diffracted optical frequency comb laser emanated from the grating. In the method, the improvement of the uncertainty of in-situ pitch measurement can be expected since every mode in the diffracted optical frequency comb laser can be utilized. Instead of employing a Fabry-Pérot etalon for the separation of the neighboring modes in the group of the diffracted laser beams, the weight-of-mass method is introduced in the method to detect the light wavelength in the Littrow configuration. An attempt is also made to reduce the influence of the non-uniform spectrum of the optical comb laser employed in the setup through normalization operation. In addition, an optical alignment technique with the employment of a retroreflector is introduced for the precise alignment of optical components in the setup. Furthermore, a mathematical model of the pitch measurement by the proposed method is established, and theoretical analysis on the uncertainty of pitch measurement is carried out based on the guide to the expression of uncertainty in measurement (GUM).

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Traceable and long-range grating pitch measurement with picometer resolution

Cited by 6 publications

References 23 publications

Research on Dual-Grating Spacing Calibration Method Based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise Combined with Hilbert Transform

Research on Dual-Grating Spacing Calibration Method Based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise Combined with Hilbert Transform

Polarization-insensitive high-efficiency two-dimensional metal-dielectric grating by nanodisks arrays

In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser

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