Towards VCSEL-based integrated optical traps for biomedical applications

Kroner, A.; Kardosh, I.; Rinaldi, F.; Michalzik, Rainer

doi:10.1049/el:20063821

Cited by 15 publications

(9 citation statements)

References 7 publications

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“…Fabrication of sags of up to ∼20 µm is possible, as well as achievement of high optical quality lens due to low surface roughness. Application to VCSELs was thus successfully performed using different types of resists, such as polyimide, on the back surface for beam collimation [34] or on top-emitting devices surfaces for beam focusing [35]. This method was also applied to the fabrication of µ-lensed optically pumped fiber VECSELs using a UV-curable epoxy resist [36].…”

Section: Self-assembly By Thermal Reflowmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

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We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.

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Section: Self-assembly By Thermal Reflowmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

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“…V ERTICAL cavity surface emitting lasers (VCSELs) are currently the first choice in photonic devices for an increasing range of applications, including short-distance data communications, optical sensors and laser printers [1]- [3], as well as flow cytometry [4], [5], parallel optical trapping [6], nano-bio-sensing [7] and optical probe microscopy [8]. This success is due to the devices' outstanding characteristics, such as parallel operation, low threshold current, high modulation rate and a circularly symmetric emitted beam.…”

Section: Introductionmentioning

confidence: 99%

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Bardinal

Camps

Reig

et al. 2015

IEEE J. Select. Topics Quantum Electron.

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In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III-V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

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“…2(b), in contrast to ring-like beam profiles from conventional VCSELs with the same aperture diameter. A ring-like emission is unfavourable for the targeted miniaturized trapping scheme because it leads to an offset between beam and trapping center [6]. Besides, lower beam quality increases the beam diameter at the focal point.…”

Section: Introductionmentioning

confidence: 99%

Miniaturized VCSEL modules for optical manipulation of microparticles

Khan

Bergmann

Michalzik

2014

8th International Conference on Electrical and Computer Engineering

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In recent years, optical manipulation has been emerging as a powerful technique in a wide range of applications, especially in the field of biological sciences. It is a mechanism to handle micrometer sized particles without mechanical or thermal damage or contamination. Lately, the use of VCSELs (vertical-cavity surface-emitting lasers) as light sources in optical manipulation has got significant attention because of their various advantages compared to conventional lasers. Particularly, their small dimensions with typical active diameters of less than ten micrometers, the possibility of simple and inexpensive formation of two-dimensional VCSEL arrays and their integration capability have made them convenient for optical manipulation applications. Another field of interest in biological research is microfluidics, which studies the manipulation and analysis of fluids in microscale. In this paper, we combine these three basic elements -VCSELs, optical manipulation, and microfluidicsto form VCSEL-based miniaturized optical trap array modules. In our previous work, the fabrication of VCSEL arrays and their characterization results were presented. In this paper, the integration of the VCSEL arrays into the module will be presented. Optical deflection experiments with microparticles will also be shown.

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Towards VCSEL-based integrated optical traps for biomedical applications

Cited by 15 publications

References 7 publications

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Miniaturized VCSEL modules for optical manipulation of microparticles

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