Towards atomic force microscopy up to 100 MHz

Abstract

An atomic force microscope for nanocantilevers measuring from a few 100 nm to a few μm in length was implemented. The natural frequencies of the nanocantilevers lie in the range of 1 MHz to 1 GHz, and optical detection schemes adapted to their size and frequency range was selected. A helium neon laser with a beat frequency of 890 MHz was used as the laser source. The beat was shifted to 1090 MHz by an acousto-optical-modulator, and used as the carrier for heterodyne laser Doppler measurement. This enabled velocity measurement up to around 100 MHz. The probe beam of the Doppler interferometer was guided to the nanocantilever by a single mode polarization-maintaining optical fiber terminated by a collimating lens, a quarter wave plate, and a focusing lens. Reflected light was collected by the same optics and mixed with the reference beam. Self-excitation of the nanocantilever at its lowest natural frequency was implemented for an amplitude of 1 nmp-p at 36 MHz. The Q factor of the cantilever was 8000. Noise effective amplitude of the Doppler interferometer was smaller than 10 pmp-p above 10 MHz. Frequency detection was possible for a nanowire measuring 100 nm in width.

Self-Oscillations in Field Emission Nanowire Mechanical Resonators: A Nanometric dc−ac Conversion

“…Previously, torsional self-excitation by mode coupling 20 and a laser driven self resonant NEMS where the driving mechanism is cyclic heat dilatation 21 Figure 1d and Figure 2c. We show next that a model in which only electromechanical effects are involved explains our experiments.…”

High Sensitivity Deflection Detection of Nanowires

“…This analysis allows us to consider whether the detection scheme should use light that scatters forwards or backwards from nanowires for position sensing [5,13]. The ratio of forwards to backward sensitivity reveals that forward scattering is preferred for most nanowires, with the exception of nanowire/spotsize combinations where the nanowire occludes the beam (e.g., near the large nanowire, small spot-size region discussed above).…”

Atomic Force Microscopy Utilizing SubAngstrom Cantilever Amplitudes

“…The output of the laser Doppler interferometer was shifted to an intermediate frequency of 10.7 MHz and then subjected to frequency shift measurement, amplitude measurement and phase shifting. Figure 1 shows the schematic of the microscope [6]. Figure 2 shows the amplitude equivalent noise versus frequency [7].…”