Towards a super-resolution structured illumination microscope based on an array of nanoLEDs

Franch, Nil; Canals, Joan; Moro, Victor; Alonso, Oscar; Moreno, Sergio Ruiz; Vilà, A.; Prades, Joan Daniel; Gülink, Jan; Wasisto, Hutomo Suryo; Waag, A.; Diéguez, Ángel

doi:10.1117/12.2529258

Cited by 4 publications

(3 citation statements)

References 13 publications

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“…With respect to singularly addressable light emitter sources, Orenstein and co-workers reached an important milestone in their pioneering work where matrix driven arrays with surface emitting laser diodes were developed [21][22][23][24] albeit for signal processing and optical communication. The further developments, which represent a significant step forward, were reported on the arrangement of LEDs in arrays [25][26][27][28][29][30][31] and the possibility to drive them preferably singularly (among others for displays) [32][33][34][35][36][37][38][39][40][41][42][43]. Hence, if all of these "ingredients/building blocks" are available within a lithography system, in principle, next generation lithography can be carried out mask-free, allowing time and resources savings, flexible structure patterning on demand.…”

Section: Introductionmentioning

confidence: 99%

Developments in Mask-Free Singularly Addressable Nano-LED Lithography

Mikulics,

Winden,

Mayer

et al. 2024

Nanomanufacturing

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LED devices are increasingly gaining importance in lithography approaches due to the fact that they can be used flexibly for mask-less patterning. In this study, we briefly report on developments in mask-free lithography approaches based on nano-LED devices and summarize our current achievements in the different building blocks needed for its application. Individually addressable nano-LED structures can form the basis for an unprecedented fast and flexible patterning, on demand, in photo-chemically sensitive films. We introduce a driving scheme for nano-LEDs in arrays serving for a singularly addressable approach. Furthermore, we discuss the challenges facing nano-LED fabrication and possibilities to improve their performance. Additionally, we introduce LED structures based on a hybrid nanocrystal/nano-LED approach. Lastly, we provide an outlook how this approach could further develop for next generation lithography systems. This technique has a huge potential to revolutionize the field and to contribute significantly to energy and resources saving device nanomanufacturing.

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Section: Introductionmentioning

confidence: 99%

Developments in Mask-Free Singularly Addressable Nano-LED Lithography

Mikulics,

Winden,

Mayer

et al. 2024

Nanomanufacturing

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“…[1,2] Due to these desirable characteristics, microLEDs are actively explored for applications in Augmented Reality/Virtual Reality displays, wearable devices, optogenetics, biomedical computational imaging, and visible light communications. [3][4][5][6][7][8] The high luminance of microLEDs is in part due to the high current density operation achievable in LEDs; this high current density operation enables a high rate of radiative recombination yielding a high rate of photon generation, but also causes substantial self-heating resulting in increased device temperature. [9] This elevated temperature activates non-radiative recombination processes and has a detrimental effect on the efficiency of microLEDs.…”

Section: Introductionmentioning

confidence: 99%

Ultra‐Thin Ceramic Substrates for Improved Heat sinking for MicroLEDs

McGinn,

Kumar,

Noga

et al. 2023

Adv Materials Technologies

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Micro light emitting diodes (MicroLEDs) provide unrivaled luminance and operating lifetime, which has led to significant activity using devices for display and non‐display applications. The small size and high power density of microLEDs, however, causes increased adverse heating effects that can limit performance. A new generation of electrically insulating high thermal conductivity materials, such as alumina, is proposed to mitigate these thermal effects when used as a substrate as an alternative to glass. This strategy can then be used as a method of passive heat sinking to improve the overall performance of the microLED. In this work, a newly available material, an 80 micron thick alumina ceramic substrate, is shown to yield a 30 % improvement on average in the maximum current drive over a glass substrate.

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“…This paper focuses on the fabrication of nanoLED arrays with single pixel control as key elements for future chipbased super-resolution microscopes, followed by a thorough analysis of the optical and electrical properties. Details on the performance as a chip microscope can be found in related publications 13,14 .…”

Section: Introductionmentioning

confidence: 99%

Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization

et al. 2020

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The rapid development of display technologies has raised interest in arrays of self-emitting, individually controlled light sources atthe microscale. Gallium nitride (GaN) micro-light-emitting diode (LED) technology meets this demand. However, the current technology is not suitable for the fabrication of arrays of submicron light sources that can be controlled individually. Our approach is based on nanoLED arrays that can directly address each array element and a self-pitch with dimensions below the wavelength of light. The design and fabrication processes are explained in detail and possess two geometries: a 6 × 6 array with 400 nm LEDs and a 2 × 32 line array with 200 nm LEDs. These nanoLEDs are developed as core elements of a novel on-chip super-resolution microscope. GaN technology, based on its physical properties, is an ideal platform for such nanoLEDs.

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Towards a super-resolution structured illumination microscope based on an array of nanoLEDs

Cited by 4 publications

References 13 publications

Developments in Mask-Free Singularly Addressable Nano-LED Lithography

Developments in Mask-Free Singularly Addressable Nano-LED Lithography

Ultra‐Thin Ceramic Substrates for Improved Heat sinking for MicroLEDs

Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization

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