Developments in Mask-Free Singularly Addressable Nano-LED Lithography
Martin Mikulics,
Andreas Winden,
Joachim Mayer
et al.
Abstract:LED devices are increasingly gaining importance in lithography approaches due to the fact that they can be used flexibly for mask-less patterning. In this study, we briefly report on developments in mask-free lithography approaches based on nano-LED devices and summarize our current achievements in the different building blocks needed for its application. Individually addressable nano-LED structures can form the basis for an unprecedented fast and flexible patterning, on demand, in photo-chemically sensitive f… Show more
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