2016
DOI: 10.1002/adma.201601801
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Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices

Abstract: Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light-emitting diodes. Here, t… Show more

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Cited by 78 publications
(59 citation statements)
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References 245 publications
(342 reference statements)
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“…The formation of complex submicrometer patterns on surfaces extending over macroscopic scale has attracted wide range of attention for different applications . Recently, micro/nanofabrication techniques with varying levels of complexity have emerged for fabricating large‐area patterns used in advanced optics, photonics, and flexible optoelectronics . The well‐designed structures have been fabricated by nanoimprint lithography, interference lithography, electron‐beam lithography, focused ion beam lithography and others .…”
Section: Introductionmentioning
confidence: 99%
“…The formation of complex submicrometer patterns on surfaces extending over macroscopic scale has attracted wide range of attention for different applications . Recently, micro/nanofabrication techniques with varying levels of complexity have emerged for fabricating large‐area patterns used in advanced optics, photonics, and flexible optoelectronics . The well‐designed structures have been fabricated by nanoimprint lithography, interference lithography, electron‐beam lithography, focused ion beam lithography and others .…”
Section: Introductionmentioning
confidence: 99%
“…The complex micrometer surface patterns show applications in many areas such sensing, optical elements, responsive surfaces and others . Micro/nanofabrication techniques with varying levels of complexity have been developed for fabricating large‐area patterns . Some well‐established techniques include nanoimprint lithography, interference lithography, electron‐beam lithography, focused ion beam lithography, among others.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, light manipulation has attracted significant attention in recent years [55][56][57][58][59]. Laser interference technology is one of the promising techniques for the fabrication of 1D, 2D, isotropic, and anisotropic micro/ nanostructures for high-efficiency OLED [14,56,57,60].…”
Section: Structures For Optical Manipulationmentioning
confidence: 99%