Touch mode capacitive pressure sensors

Ko, Wen H.; Wang, Qiang

doi:10.1016/s0924-4247(99)00069-2

Cited by 207 publications

(107 citation statements)

References 6 publications

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“…The main feature of the chips is circular flexible membranes with a diameter, d = 500mm this geometry reduces stress on the edges of the membrane while maximizing and changing the sensitivity of the device [5] . Both pressure and flow rate sensing MEMS devices have been successfully designed and tested to demonstrate that it is possible to monitor both parameters in a hydrocephalic patient or other slow moving fluid.…”

Section: Dynamics Of Fluids In Medical Fieldmentioning

confidence: 99%

Recent Trends and Advancements in the field of Micro Electrical and mechanical Systems (MEMS) Technology

al.¹

2017

IJMPERD

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Section: Dynamics Of Fluids In Medical Fieldmentioning

confidence: 99%

Recent Trends and Advancements in the field of Micro Electrical and mechanical Systems (MEMS) Technology

al.¹

2017

IJMPERD

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“…The sensor can be designed to operate in touch mode to obtain a nearly linear performance. (6) An MEMS capacitive pressure sensor is designed and fabricated using a similar wafer bonding and etch-back process as described in Ref. 7.…”

Section: Mems Capacitive Pressure Sensormentioning

confidence: 99%

Wireless Implantable Blood Pressure Sensing Microsystem Design for Monitoring of Small Laboratory Animals

2009

Sensors and Materials

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A design of a novel wireless implantable blood pressure sensing microsystem for advanced biological research is presented. The system employs a miniature instrumented elastic cuff, wrapped around a blood vessel, for small laboratory animal real-time blood pressure monitoring. The elastic cuff is made of biocompatible soft silicone material by a molding process and is filled by insulating silicone oil with an immersed MEMS capacitive pressure sensor interfaced with low-power integrated electronic system. This technique avoids vessel penetration and substantially minimizes vessel restriction due to the soft cuff elasticity, and is thus attractive for long-term implant. The MEMS pressure sensor detects the coupled blood pressure waveform caused by the vessel expansion and contraction, followed by amplification, 11-bit digitization, and wireless FSK data transmission to an external receiver. The integrated electronics are designed with capability of receiving RF power from an external power source and converting the RF signal to a stable 2 V DC supply in an adaptive manner to power the overall implant system, thus enabling the realization of stand-alone batteryless implant microsystem. The electronics are fabricated in a 1.5 μm CMOS process and occupy an area of 2 mm × 2 mm. The prototype monitoring cuff is wrapped around the right carotid artery of a laboratory rat to measure real-time blood pressure waveform. The measured in vivo blood waveform is compared with a reference waveform recorded simultaneously using a commercial catheter-tip transducer inserted into the left carotid artery. The two measured waveforms are closely matched with a constant scaling factor. The ASIC is interfaced with a 5-mm-diameter RF powering coil with four miniature surface-mounted components (one inductor and three capacitors) over a thin flexible substrate by bond wires, followed by silicone coating and packaging with the prototype blood pressure monitoring cuff. The overall system achieves a measured average sensitivity of 7 LSB/ mmHg, a nonlinearity less than 2.5% of full scale, and a hysteresis less than 1% of full scale. From noise characterization, a blood vessel pressure change sensing resolution 328 Sensors and Materials, Vol. 20, No. 7 (2008) of 1 mmHg can be expected. The system weighs 330 mg, representing an order of magnitude mass reduction compared with state-of-the-art commercial technology.

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“…Membrane shape affects maximum stress distribution considering linearity and burst pressure [3]. A square membrane shape is preferable since it allows a sophisticated design in a small area and can be produced with a clean lithography process [4]. A boss beam-membrane design is well suited to analyze pressures below 1 kPa [5].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

Arjunan¹,

Shanmuganantham²

2017

Transactions on Electrical and Electronic Materials

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This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

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Touch mode capacitive pressure sensors

Cited by 207 publications

References 6 publications

Recent Trends and Advancements in the field of Micro Electrical and mechanical Systems (MEMS) Technology

Recent Trends and Advancements in the field of Micro Electrical and mechanical Systems (MEMS) Technology

Wireless Implantable Blood Pressure Sensing Microsystem Design for Monitoring of Small Laboratory Animals

Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

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