Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

Abstract

This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

Development of high-sensitivity piezoresistive pressure sensors for −0.5…+0.5 kPa

“…of MS of different signs. Although reactive ion etching (RIE) of silicon is widely employed for fabrication of chips for ultra-low pressure ranges [16][17][18][19][20][21], the membrane structure is formed using wet anisotropic etching without use of RIE from either the top or back side of the chip.…”

Ultra-High Sensitivity MEMS Pressure Sensor Utilizing Bipolar Junction Transistor for Pressures Ranging From −1 to 1 kPa

“…Recently there were several publications on design and modeling of low pressure piezoresistive sensors [8][9][10][11][12][13][14][15][16][17][18]. These publications are mostly focused on achieving higher pressure sensitivity and improving sensor performance by optimization of mechanical structure of pressure sensor chips.…”

Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier

“…Alternatively, it can be used to reduce size and cost of pressure sensor die and/or increase its overload capability without reducing sensitivity to pressure. The last task is typically solved by changing the geometry of the diaphragm [13][14][15][16][17][18][19][20][21][22][23][24][25][26].…”