Total dose effects and SEE screening on MEMS COTS accelerometers

Cournar, O.; Miller, F. L.; Buard, N.; Poirot, P.; Gaillard, R.; Marchand, L.

doi:10.1109/redw.2004.1352918

Cited by 6 publications

(6 citation statements)

References 4 publications

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“…Accelerometers, in particular monolithic comb-drive polysilicon devices manufactured by Analog Devices, have been investigated for TID effects [26], [33], [34]. The devices operate by sensing the change in capacitance as a suspended proof mass moves in response to external accelerations.…”

Section: Electrostatic Mems Sensors and Actuatorsmentioning

confidence: 99%

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Effects of radiation on MEMS

Shea

2011

SPIE Proceedings

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The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics, and thus affects most strongly MEMS devices operating on electrostatic principles. A survey of all published reports of radiation effects on MEMS is presented. The different sensing and actuation physical principles and materials used in MEMS are compared, leading to suggested was to increase radiation tolerance by design, for instance by choice of actuation principle or by electrical shielding of dielectrics.

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Section: Electrostatic Mems Sensors and Actuatorsmentioning

confidence: 99%

“…SOI bulk micromachined accelerometers from VTT, Finland, operating by measuring the capacitance between suspended parallel plates were subjected to gamma-rays, and failed at 50 krad [34]. The sensor was packaged with a readout-ASIC, which was found to latch-up at low doses of infrared laser pulses.…”

Section: Electrostatic Mems Sensors and Actuatorsmentioning

confidence: 99%

Effects of radiation on MEMS

Shea

2011

SPIE Proceedings

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“…33,41,42 The devices operate by sensing the change in capacitance as a suspended proof mass moves in response to external accelerations. It is thus very sensitive to any static charge in exposed dielectrics, and Knudson et al 41 showed the radiation-induced output voltage shift was due to charging of a dielectric under the proof mass.…”

Section: Electrostatic Microelectromechanical System Sensors and Actumentioning

confidence: 99%

“…42 The sensor was packaged with a readout-ASIC, which was found to latch-up at low doses of infrared laser pulses. It was not determined if the failure at 50 krad was due to the sensor or the ASIC.…”

Section: Electrostatic Microelectromechanical System Sensors and Actumentioning

confidence: 99%

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Radiation sensitivity of microelectromechanical system devices

Shea

2009

J. Micro/Nanolith. MEMS MOEMS

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Abstract. The sensitivity of microelectromechanical system ͑MEMS͒ devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions rather than of operation in nuclear reactors. As a purely structural material, silicon has shown no mechanical degradation after radiation doses in excess of 100 Mrad. MEMS devices, even when excluding control/readout electronics, have, however, failed at doses of only 20 krad, though some devices have been shown to operate correctly for doses greater than 10 Mrad. Radiation sensitivity depends strongly on the sensing or actuation principle, device design, and materials, and is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics. MEMS devices operating on electrostatic principles can be highly sensitive to charge accumulation in dielectric layers, especially for designs with dielectrics located between moving parts. In contrast, thermally and electromagnetically actuated MEMS are much more radiation tolerant. MEMS operating on piezoresitive principles start to slowly degrade at low doses, but do not fail catastrophically until doses of several Mrad. A survey of all published reports of radiation effects on MEMS is presented, as well as a summary of techniques that can improve their radiation tolerance.

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