2005
DOI: 10.1088/0953-4075/38/3/005
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Total and ionization cross sections of electron scattering by fluorocarbons

Abstract: Electron impact total cross sections (50–2000 eV) and total ionization cross sections (threshold to 2000 eV) are calculated for typical plasma etching molecules CF4, C2F4, C2F6, C3F8 and CF3I and the CFx (x = 1–3) radicals. The total elastic and inelastic cross sections are determined in the spherical complex potential formalism. The sum of the two gives the total cross section and the total inelastic cross section is used to calculate the total ionization cross sections. The present total and ionization cross… Show more

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Cited by 43 publications
(34 citation statements)
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“…The BEB cross sections are generally significantly larger (and their maxima are shifted to higher electron impact energies) than the DM cross sections -ranging from a factor of 1.7 in case of Fe 2 O 2 down to 1.4 in case of Fe 3 O 4 -which is in line with a study on iron hydrogen clusters EICSs [22] in which also discrepancies between those two methods were obtained which were larger than previously assumed to be the norm. We note that there have been cases reported in which the DM method resulted in cross sections which were significantly smaller and also showed a faster decrease beyond the maximum than it was the case for cross sections obtained using other methods or experimental ones [66][67][68]. In reference [22] the discrepancy between DM and BEB cross sections was related to the different methodological foundations of the methods, and especially to the explicit inclusion of geometric parameters in terms of the radius of maximum radial density of atomic subshells (see also Sect.…”
Section: Electron Impact Ionisation Cross Sectionsmentioning
confidence: 55%
“…The BEB cross sections are generally significantly larger (and their maxima are shifted to higher electron impact energies) than the DM cross sections -ranging from a factor of 1.7 in case of Fe 2 O 2 down to 1.4 in case of Fe 3 O 4 -which is in line with a study on iron hydrogen clusters EICSs [22] in which also discrepancies between those two methods were obtained which were larger than previously assumed to be the norm. We note that there have been cases reported in which the DM method resulted in cross sections which were significantly smaller and also showed a faster decrease beyond the maximum than it was the case for cross sections obtained using other methods or experimental ones [66][67][68]. In reference [22] the discrepancy between DM and BEB cross sections was related to the different methodological foundations of the methods, and especially to the explicit inclusion of geometric parameters in terms of the radius of maximum radial density of atomic subshells (see also Sect.…”
Section: Electron Impact Ionisation Cross Sectionsmentioning
confidence: 55%
“…At elevated CF 4 partial pressures the secondary electron yield is also affected by the different ionization potentials of Ar and CF 4 (I Ar = 15.76 eV, I CF4 = 16.91 eV [35]). For ion energies below 1 keV, which is the case for the here applied processes, γ SE is entirely depending on the target material and the sputter gas.…”
Section: Synthesis Of Cf X Thin Filmsmentioning
confidence: 99%
“…Moreover, since the ionization potentials from fractured CF 4 species are considerably lower (I CF = 9.11 eV, I CF2 = 11.44 eV and I CF3 = 8.9 eV [35]) than for CF 4 it is reasonable to assume an increased importance of those ionized radicals contributing to the plasma chemistry.…”
Section: Synthesis Of Cf X Thin Filmsmentioning
confidence: 99%
“…Though this method can attain good results over a wide energy range, the applications are limited since the two adjustable values are different for each target, and their value determinations require experimental findings. Recently, to find the TCSs of electron scattering by molecules, Antony et al (2005) have also proposed a modified AR named the group additivity method, where the cross section arising from each constituent group of a molecule was added together to obtain the molecular TCS. Using this method, they have computed the TCSs of electron scattering by several molecules.…”
Section: Introductionmentioning
confidence: 99%