Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution

Seah, M. P.

doi:10.1002/sia.3798

Cited by 23 publications

(24 citation statements)

References 40 publications

(43 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Wehner 33 first showed the importance of this effect in the surface topography after sputtering. In 2012, Seah 34 showed that good computations of the surface form could be obtained by using a combination of Sigmund's sputtering theory 35 and the evaluations of relevant parameters by Yamamura et al 36 Further evaluations were made by Seah 34 leading to a set of 9 equations to describe the sputtering yield and its dependence on the incidence angle, θ.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Chemical Imaging of Buried Interfaces in Organic–Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry

Tiddia

Mihara

Seah

et al. 2019

ACS Appl. Mater. Interfaces

View full text Add to dashboard Cite

Organic-inorganic hybrid materials enable the design and fabrication of new materials with enhanced properties. The interface between the organic and inorganic materials is often critical to the device's performance and therefore chemical characterization is of significant interest. Since the interfaces are often buried, milling by focused ion beams (FIB) to expose the interface is becoming increasingly popular. Chemical imaging can subsequently be obtained using secondary ion mass spectrometry.However, the FIB milling process damages the organic material. In this study, we make an organicinorganic test structure to develop a detailed understanding of the processes involved in FIB milling and SIMS imaging. We provide an analysis methodology that involves a "clean-up" process using sputtering with an Argon gas cluster ion source to remove the FIB induced damage. The methodology is evaluated for an additive manufactured encapsulated strain sensor containing silver tracks embedded in a polymeric material. We show a polymer-silver interface with a resolution of 440 nm and that the polymer contains a low level of silver particulates.

show abstract

Section: ■ Results and Discussionmentioning

confidence: 99%

Chemical Imaging of Buried Interfaces in Organic–Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry

Tiddia

Mihara

Seah

et al. 2019

ACS Appl. Mater. Interfaces

View full text Add to dashboard Cite

show abstract

“…Inkjet printing presents more precise deposition, which appears superior to screen printing or some traditional deposition techniques such as lamination, [ 52,53 ] drop‐casting, [ 54,55 ] and sputtering. [ 56,57 ] With the diversity of wide‐range printable solvents, inkjet printing has become an alternative with high promise to conventional MBs’ fabrication techniques.…”

Section: Technique Fundamentalmentioning

confidence: 99%

Recent Advances in High‐Performance Microbatteries: Construction, Application, and Perspective

Zhu

Kan

et al. 2020

Small

View full text Add to dashboard Cite

considered indispensable and stimulate great upsurge in interest on relevant researches. [1-4] Through integrating with multiple functional materials or devices, the miniaturized energy-storage device can power functional systems, such as microactuators, implantable biosensors, and wearable gadgets. [5,6] As far as the performance is concerned, the shift from disposable or nonrechargeable product to a high-energy output device or even complicated system has motivated the improvement of energy storage capability during the past decade. Generally, microsupercapacitor (MSC) possesses the advantages of fast charge/discharge rate and long cycling lifetime, making it possible for some maintenance-free wearable microelectronics and biomedical devices. [7,8] However, the energy storage gap about an order of magnitude still exists in comparison with microbattery (MB), and the insufficient energy supply restricts the widespread applications of MSC in the main power systems. [9] Serving as the primary choice for powering advanced miniaturized devices, MBs ensure sufficient energy density and maintain a stable voltage output. In general, a rechargeable battery consists of cathode, anode, and electrolyte in between, therefore it is the electrode that calls for miniaturization in size ranging from microns to centimeters. The total energy available in a MB generally depends on the active materials loaded on a certain small area. Based on this, some concepts of MB have been proposed, such as ultrathin microelectrode for high volumetric specific energy and somewhat thick microelectrode for high areal specific energy. [10,11] In terms of the dimensional ratio of MB, the thickness of microelectrode gives priority to the transport distance of ions and electrons, thus favoring the improvement in power density when compared with the macro one. [12,13] The decisive factor for the performance of MB is the reaction mechanism, and multiple battery forms have been expanded into miniaturized power supply as the supplement. Among the MBs mainly represented by lithium-ion batteries (LIBs) with organic electrolyte, various alkali metal ion batteries with abundant resources have been explored for possible substitution of lithium. [14-16] From the perspective of intrinsic safety, aqueous batteries have been developed with the merits of both inexpensive electrolyte and relatively higher power density. [17] Additionally, air batteries derived from fuel cells and ideally comprised of infinite O 2 supply for cathode reaction High-performance miniaturized energy storage devices have developed rapidly in recent years. Different from conventional energy storage devices, microbatteries assume the main responsibility for micropower supply, functionalization, and characterization platforms. Evolving from the essential goals for battery design of high power density, high energy density, and long lifetime, further practical demands for microbatteries (MBs) have been raised for the microfabrication technique and device design. Numerous studies have generally...

show abstract

“…Topography effects and topography evolution during sputtering of nanoparticles have been modeled in ref. 74.…”

Section: Nanoparticlesmentioning

confidence: 99%

SIMS imaging of the nanoworld: applications in science and technology

Senoner

Unger

2012

J. Anal. At. Spectrom.

View full text Add to dashboard Cite

Secondary Ion Mass Spectrometry (SIMS) enables surface chemical analysis of nano-scaled objects and chemical imaging of nano-scaled details of natural or artificial objects. This review presents the state of the art in nanoscale SIMS analysis. At first a short introduction into recent instrumentation for high resolution SIMS imaging and the limiting factors of lateral resolution is given. The next section covers the chemical analysis of nanoparticles. Recent applications of nanoscale imaging SIMS in geology, cosmochemistry, materials research, cellular biology, ecology and medical research are summarized and illustrated by examples.

show abstract

Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution

Cited by 23 publications

References 40 publications

Chemical Imaging of Buried Interfaces in Organic–Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry

Chemical Imaging of Buried Interfaces in Organic–Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry

Recent Advances in High‐Performance Microbatteries: Construction, Application, and Perspective

SIMS imaging of the nanoworld: applications in science and technology

Contact Info

Product

Resources

About