biomolecules that have small Raman cross sections in the visible and NIR regions. [ 2 ] However, interband transitions introduce a dissipative channel for Au and Ag plasmon resonances at wavelengths shorter than 550 and 350 nm, respectively. aluminium (Al) has recently been suggested as promising plasmonic material in the UV and DUV regions because it has negative real part of dielectric function down to a wavelength of ≈100 nm. [ 3 ] The sharpness and intensity of LSPR of small Al NPs improve with increasing energy. The excellent optical properties of Al make it an excellent material for UV nanoantennas, [ 4 ] DUV SERS, [ 2,5 ] lightemission enhancement of wide-bandgap semiconductors, [ 6 ] and improvement of light harvesting in solar cells. [ 7 ] Moreover, Al is signifi cantly cheaper than most other metals, and could potentially serve as the metal of choice for either complementary metal-oxide-semiconductor (CMOS) compatible or mass-producible plasmonic applications.Controllability of LSPR energies is highly required for plasmonic applications. For instance, DUV-SERS of adenine on Al nanostructures requires their resonance peaks close to the excitation wavelength to ensure high-electromagnetic nearfi eld enhancement. [ 2,5 ] LSP-enhanced DUV light-emission in AlGaN multiple quantum wells desires large spectral overlap between the plasmon resonance of Al NPs and the bandgap of active layer. [ 8 ] Al NPs are generally designed with the help of electron beam lithography (EBL) and focused ion beam (FIB) lithography in order to obtain well-controlled structures. [ 4 , 7b , 9 ] However, these approaches involve a slow process and are not cost effective, so that they are not practical for large area (square cm) fabrication. Although Al NPs can be fabricated by modifi ed methods of annealing thin Al fi lm, [ 10 ] such techniques often lead to signifi cant size dispersion, and it is diffi cult to tune the size and interval of particles independently. Anodic Al oxide (AAO), which is prepared by the anodic oxidation of Al in an acidic electrolyte, is one of the typical self-organized fi ne structures with a nanohole array. Using AAO as an evaporation or electrodeposition mask, ordered NP arrays can be formed. [ 11 ] This process has several advantages: each particle has almost identical size and spacing, the size and the spacing can be easily controlled by changing the geometrical structure of the AAO mask, there is no practical limitation to the size of the AAO template, so that very large panels of NPs can be made with low cost. However, to the best of our knowledge, the study