Tool setting error compensation in large aspherical mirror grinding

Wei, Xiang; Li, Bing; Chen, Lei; Xin, Meiting; Liu, Bingcai; Jiang, Zhuangde

doi:10.1007/s00170-017-1094-3

Cited by 7 publications

(6 citation statements)

References 10 publications

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“…It has the advantages of reducing system weight, simplifying system structure and expanding system function. At the same time, it can not only improve the resolution and improve the working distance of the system, but correct the system aberration [2][3].…”

Section: Introductionmentioning

confidence: 99%

Measurement of Aspheric Surfaces Using an Arcuate Region Scanning Method by 2D Laser Displacement Sensor

Lan

Wei

et al. 2022

J. Phys.: Conf. Ser.

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This study proposes an effective measurement of aspheric surfaces using arcuate region scanning method by 2D laser displacement sensor. In a global coordinate system, the point cloud data of each arcuate region in aspheric surface are obtained successively, coordinated with the rotation of the rotating platform and the transverse movement of the 2D laser displacement sensor in a fixed step size. When scanning different areas, it is necessary to calculate the scanning angle gap and included angle according to different scanning length of arc. Then the aspheric surface error could be calculated through the reconstruction consequence. It can be used for in-situ measurement in the processing stage of aspheric mirrors. We present an experiment compared with the measurement results of PGI to verify the validity of this measurement method.

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Section: Introductionmentioning

confidence: 99%

Measurement of Aspheric Surfaces Using an Arcuate Region Scanning Method by 2D Laser Displacement Sensor

Lan

Wei

et al. 2022

J. Phys.: Conf. Ser.

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“…Using the computer-controlled optical surfacing technique, a form precision of 12 nm RMS for a 1-m mirrors was achieved. In recent years, Jiang et al at Xi'an Jiaotong University developed two ultra-precision aspheric grinding machines with maximum machinable diameters of Ф900 mm [23,24] and Ф1500 mm [25,26]. The achievable form error for a 400-mm mirror was smaller than 5 μm PV using the arc envelope grinding method.…”

Section: Introductionmentioning

confidence: 99%

“…Nevertheless, elaborate numerical computations were required to obtain the form error. Wei et al [26] and Xi et al [24] developed analytical tool setting error models that encompassed both the radial and lateral directions. However, these models did not account for the variation in the grinding point during arc envelope grinding; as such, the prediction accuracy was limited, especially for steep aspheric surfaces.…”

Section: Introductionmentioning

confidence: 99%

Wheel Setting Error Modeling and Compensation for Arc Envelope Grinding of Large-Aperture Aspherical Optics

Sun

Chen

et al. 2022

Chin. J. Mech. Eng.

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Precision grinding is a key process for realizing the use of large-aperture aspherical optical elements in laser nuclear fusion devices, large-aperture astronomical telescopes, and high-resolution space cameras. In this study, the arc envelope grinding process of large-aperture aspherical optics is investigated using a CM1500 precision grinding machine with a maximum machinable diameter of Φ1500 mm. The form error of the aspherical workpiece induced by wheel setting errors is analytically modeled for both parallel and cross grinding. Results show that the form error is more sensitive to the wheel setting error along the feed direction than that along the lateral direction. It is a bilinear function of the feed-direction wheel setting error and the distance to the optical axis. Based on the error function above, a method to determine the wheel setting error is proposed. Subsequently, grinding tests are performed with the wheels aligned accurately. Using a newly proposed partial error compensation method with an appropriate compensation factor, a form error of 3.4 μm peak-to-valley (PV) for a Φ400 mm elliptical K9 glass surface is achieved.

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“…By using the Computer-Controlled Optical Polishing (CCOP) technique, the form precision of 12 nm RMS for 1 m-scale mirrors was achieve. In recent years, Xi'an Jiaotong University has developed two ultra-precision aspheric grinding machines with maximum machinable diameter of Ф900 mm (Bin, Jianpu, Dongxu, Zexiang, & Zhao, 2019;Xi, Zhao, Li, & Ren, 2016) and Ф1500 mm (Sun et al, 2017;Wei et al, 2018). By using the Arc Envelope Grinding Method (AEGM), the achievable form error is smaller than 5 μm PV.…”

Section: Introductionmentioning

confidence: 99%

“…However, the relationship between wheel setting error and the workpiece form error has not been analytically modelled. Xiang Wei et al (Wei et al, 2018) and Jianpu Xi et al (Xi et al, 2016) developed tool setting error models covering both the radial and lateral directions, but these models neglected the variation of the grinding point during the AEGM, which limits the prediction accuracy, especially for steep aspheric surfaces.…”

Section: Introductionmentioning

confidence: 99%

Wheel Setting Error Modelling and Compensation for Arc Envelope Grinding of Large-aperture Aspherical Optics

Li¹,

Sun²,

Chen³

et al. 2021

Preprint

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Precision grinding is the key process to meet the heavy demands of large-aperture aspherical optical elements in the fields of laser nuclear fusion devices, large-aperture astronomical telescopes and high-resolution space cameras. In this study, the arc envelope grinding process of large-aperture aspherical optics was investigated using the CM1500 precision grinding machine with a maximum machinable diameter of Φ1500 mm. The analytical form error models of aspherical workpiece induced by wheel setting errors were established for both parallel grinding and cross grinding. Result show that the form error is much more sensitive to the wheel setting error along the feed direction than that along the lateral direction. It is a bilinear function of the feed-direction wheel setting error and the distance to optical axis. Based on the above analysis, a method to determine the wheel setting error is proposed. The grinding tests were then performed with the wheel accurately aligned. By using a newly proposed partial error compensation method with an appropriate compensation factor, a form error of 3.4 µm PV for a Φ400 mm elliptical K9 glass surface was achieved.

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Tool setting error compensation in large aspherical mirror grinding

Cited by 7 publications

References 10 publications

Measurement of Aspheric Surfaces Using an Arcuate Region Scanning Method by 2D Laser Displacement Sensor

Measurement of Aspheric Surfaces Using an Arcuate Region Scanning Method by 2D Laser Displacement Sensor

Wheel Setting Error Modeling and Compensation for Arc Envelope Grinding of Large-Aperture Aspherical Optics

Wheel Setting Error Modelling and Compensation for Arc Envelope Grinding of Large-aperture Aspherical Optics

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