Toggle-switch - a new type of RF MEMS switch for power applications

Schauwecker, B.; Strohm, K.A.; Simon, Winfried; Mehner, Jan; Luy, J.-F.

doi:10.1109/mwsym.2002.1011597

Cited by 16 publications

(7 citation statements)

References 10 publications

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“…Therefore, the series capacitance of the open-state of the switch, C s , can be extracted from the measured isolation of the switch using equation (3). The isolation of the open switch increases with the decrease in C s .…”

Section: Rf Modelling Of the Lateral Switchmentioning

confidence: 99%

Low-loss lateral micromachined switches for high frequency applications

Liu

Tang

Agarwal

et al. 2004

J. Micromech. Microeng.

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Two novel lateral metal-contact radio-frequency microelectromechanical system (RF MEMS) switches are reported. These switches are implemented with quasi-finite ground coplanar waveguide (FGCPW) configuration and actuated by applying electrostatic force on a high-aspect-ratio cantilever beam. It is demonstrated that the insertion loss of the switch is less than 0.2 dB up to 15 GHz and the isolation is higher than 20 dB up to 25 GHz. An RF model of the switches is used to analyse the effects of the switch design parameters and RF performance. The optimization of the switch mechanical design is discussed where the threshold voltage can be lower than 25 V. The lateral switches are fabricated by deep reactive ion etching (DRIE) process on a silicon-on-insulator (SOI) wafer with shadow mask technology.

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Section: Rf Modelling Of the Lateral Switchmentioning

confidence: 99%

Low-loss lateral micromachined switches for high frequency applications

Liu

Tang

Agarwal

et al. 2004

J. Micromech. Microeng.

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“…The expansion of the mode superposition approach to capture the strongly nonlinear mechanical contact behavior of MEMS including surface interactions is still a major challenge although huge progress has been made [1,3,11]. One basic approach of modeling contacts without surface interactions has been presented by Bennini [11].…”

Section: Contact Phenomena At System Levelmentioning

confidence: 99%

Recent developments in reduced order modeling based on mode superposition technique

Kolchuzhin

Naumann

Mehner

2011

2011 12th Intl. Conf. On Thermal, Mechanical &Amp; Multi-Physics Simulation and Experiments in Microelectronics and Microsystem

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“…Chan et al [21] and Goldsmith et al [22]- [24] indicated that a high actuation voltage may lead to a shorter lifetime for direct contact and capacitive MEMS switches which use dielectric layers for isolation. Schauwecker et al [25] and Rebeiz and Muldavin [26] point out that that the power handling capability is often lower than 100 mW, whereas most wireless applications may require 1 W.…”

Section: A Characterization and Modeling Of Rf-mems Switchesmentioning

confidence: 99%

Robust Design of RF-MEMS Cantilever Switches Using Contact Physics Modeling

Shalaby

Wang²,

Chow

et al. 2009

IEEE Trans. Ind. Electron.

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This paper presents the robust design optimization of an RF-MEMS direct contact cantilever switch for minimum actuation voltage and opening time, and maximum power handling capability. The design variables are the length and thickness of the entire cantilever, the widths of the sections of the cantilever, and the dimple size. The actuation voltage is obtained using a 3-D structural-electrostatic finite-element method (FEM) model, and the opening time is obtained using the same FEM model and the experimental model of adhesion at the contact surfaces developed in our previous work. The model accounts for an unpredictable variance in the contact resistance resulting from the micromachining process for the estimation of the power handling. This is achieved by taking the ratio of the root mean square power of the RF current ("signal") passing through the switch to the contact temperature ("noise") resulting from the possible range of the contact resistance. The resulting robust optimization problem is solved using a Strength Pareto Evolutionary Algorithm, to obtain design alternatives exhibiting different tradeoffs among the three objectives. The results show that there exists substantial room for improved designs of RF-MEMS direct-contact switches. It also provides a better understanding of the key factors contributing to the performances of RF-MEMS switches. Most importantly, it provides guidance for further improvements of RF-MEMS switches that exploit complex multiphysics phenomena.

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Toggle-switch - a new type of RF MEMS switch for power applications

Cited by 16 publications

References 10 publications

Low-loss lateral micromachined switches for high frequency applications

Low-loss lateral micromachined switches for high frequency applications

Recent developments in reduced order modeling based on mode superposition technique

Robust Design of RF-MEMS Cantilever Switches Using Contact Physics Modeling

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