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2009
DOI: 10.1002/ppap.200930704
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Titanium Nitriding by Microwave Atmospheric Pressure Plasma: Towards Single Crystal Synthesis

Abstract: High temperature titanium nitriding is achieved by plasmas sustained at atmospheric pressure in a microwave resonant cavity. TiN layers produced in the temperature range (1 475–1 980 K) present a grain orientation that is mainly defined by initial grain orientation of the titanium substrate. Coarsening pretreatments on the titanium samples before nitriding allows the synthesis of a strongly oriented TiN layer. The TiN + α‐Ti layer thickness reaches about 116 µm after a 1 h treatment at 1 760 K. For these treat… Show more

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Cited by 9 publications
(3 citation statements)
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“…Gas-phase nucleation of nanomaterials in a microplasma from vapour precursors (e.g. figure 3) is a natural extension of previous studies with low-pressure plasmas [10] and largerscale atmospheric plasmas and jets [40,41]. There are many different precursors that are available, generally referred to as chemical vapour deposition (CVD) or metal-organic chemical vapour deposition (MOCVD) precursors, that can be nonthermally dissociated in a microplasma to grow different types of materials (i.e.…”
Section: Gas-phase Synthesismentioning
confidence: 59%
See 1 more Smart Citation
“…Gas-phase nucleation of nanomaterials in a microplasma from vapour precursors (e.g. figure 3) is a natural extension of previous studies with low-pressure plasmas [10] and largerscale atmospheric plasmas and jets [40,41]. There are many different precursors that are available, generally referred to as chemical vapour deposition (CVD) or metal-organic chemical vapour deposition (MOCVD) precursors, that can be nonthermally dissociated in a microplasma to grow different types of materials (i.e.…”
Section: Gas-phase Synthesismentioning
confidence: 59%
“…Finally, the particles will exit the plasma volume as an aerosol flow. This approach has been successfully used to synthesize carbon nanomaterials [42][43][44][45], silicon nanoparticles [37][38][39][40][41][42][43][44][45][46][47] and metal nanoparticles [48,49]. Compared with low-pressure plasma experiments (e.g.…”
Section: Gas-phase Synthesismentioning
confidence: 99%
“…Microwave nonequilibrium plasmas at atmospheric pressure have specific characteristics; for example, the temperature of the gas can be easily controlled, reaching high values (>3000 • C). This thermal energy can be employed in materials treatment, together with active species generated in the plasma, and it has already been applied to the nitriding of titanium [22]. In this paper, a novel microwave plasma source was designed, allowing simultaneous or step-wise microwave plasma oxidation and carburizing, which was applied to Grade 37 titanium.…”
Section: Introductionmentioning
confidence: 99%