Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

Malshe, Ajay P.; Rajurkar, K. P.; Virwani, Kumar; Taylor, Curtis R.; Bourell, David L.; Levy, Gideon; Sundaram, Murali; McGeough, J. A.; Kalyanasundaram, V.; Samant, Anoop N.

doi:10.1016/j.cirp.2010.05.006

Cited by 86 publications

(38 citation statements)

References 184 publications

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“…There are many different methods, such as photolithography [1], LIGA [2], FIB (Focused Ion Beam) technology [3], nanoimprint [4] and tip based nanomanufacturing (TBN) [5]. Among all of these methods, every technique has its own advantages and special applications, but the tip based micro/nano machining is attracting more and more attention for the low-cost, simple operation and high accuracy.…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

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Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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“…However, parallel fabrication currently does not allow precise control over size, shape, position, or orientation of individual structures. A fundamental understanding of substrate deformations/separations and the tip is needed to achieve controllable nanomanufacturing [1]. Attempts have been made to study the correlation between machining parameters, machined geometry, and surface properties for better control of AFMbased nanomachining processes both experimentally [15][16][17][18][19][20][21] and computationally .…”

Section: Introductionmentioning

confidence: 99%

“…Atomic force microscope (AFM) has been considered a potential manufacturing tool for operations including machining, patterning, and assembling with in situ metrology and visualization [1]. AFM-based nanomachining generally involves nanoindentation and nanoscratching, which have been commonly used in the characterization of surfaces or smallscale materials [2].…”

Section: Introductionmentioning

confidence: 99%

Molecular Dynamics Simulation Model of AFM-Based NanoMachining

Promyoo¹,

El-Mounayri²,

Varahramyan³

2014

Computer Science &Amp; Information Technology ( CS &Amp; IT )

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“…Tip based electrochemical machining has been widely used in the past to subtractively machine metallic or non-metallic structures for microdevices. 10,11 However, electrochemical deposition processes have not been used until more recently for additive formation of 3D metal [12][13][14][15] and conductive polymer [16][17][18] micro-structures. Metal electrodeposition typically involves the reduction of metal ions into metal atoms on a conductive substrate.…”

mentioning

confidence: 99%

Electrochemical Formation of Free-Standing 3D Structures Using Injection of Additives

Huang

Gyorgak

Pak

2017

J. Electrochem. Soc.

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A new method of electrochemical formation of free-standing 3D structures based on the injection of additives that controls the deposition rate was demonstrated using copper-chloride-polyethylene glycol as an example. A densely-packed defect-free pillar was formed upon the injection of chloride-free electrolyte into a chloride-containing electrolyte, where copper deposition was fully suppressed. The effects of diffusion coefficient, injection rate and the distance between injection nozzle and pillar top were evaluated with numerical simulation. A fast diffusion species, a moderate injection rate and a small gap between injection and pillar were found beneficial to obtaining the best contrast in the growth rates between pillar and background. The demonstration of free-standing copper structure in this paper provides an alternative path for electrochemical 3D printing of various metallic materials. Free-standing metallic structures are of interest for various devices. The recently developed additive manufacturing enables the direct formation of such structures without the need of expensive lithography processes.1 Among them, the metal wire feed process 2 was directly adapted from the original extrusion version of polymer 3D printing. 3-5 Extrusion and sintering of metal paste 6 also allow the formation of metal structures. Selective laser melting or sintering [7][8][9] of metal particles can create free-standing or non-attached metallic structures embedded in metal powders.While most of the above processes were heat-based physical processes, chemical reaction based 3D printing processes have been developed typically for direct formation of smaller structures. Tip based electrochemical machining has been widely used in the past to subtractively machine metallic or non-metallic structures for microdevices.10,11 However, electrochemical deposition processes have not been used until more recently for additive formation of 3D metal [12][13][14][15] and conductive polymer [16][17][18] micro-structures. Metal electrodeposition typically involves the reduction of metal ions into metal atoms on a conductive substrate. Therefore, 3D electrodeposition methods taking advantage of a local electrical field, local metal ion or local conductive substrate have been developed. The traditional lithography based electroforming, for example, the through-mask plating and LIGA process are based on the local exposure of conductive substrate. 19 This through mask concept has also been extended to achieve direct formation of nanostructures through local deposition. [20][21][22] Another so-called local electrochemical deposition was invented relying on a locally positioned anode.12-14 Such an anode is typically surrounded by a large insulating material and is closely positioned in a vicinity of the cathode substrate, 23-26 creating a highly local electrical field that enables the deposition to occur only at the location closest to the anode. Recently, Hirt et al. 27 used a modified atomic force microscope tip with fluidic channel to introduc...

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Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

Cited by 86 publications

References 184 publications

Experimental investigation of the tip based micro/nano machining

Experimental investigation of the tip based micro/nano machining

Molecular Dynamics Simulation Model of AFM-Based NanoMachining

Electrochemical Formation of Free-Standing 3D Structures Using Injection of Additives

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