Tip-Based Nanofabrication for NEMS Devices

Pu, Dong; Hu, Huan

doi:10.1007/978-3-030-79749-2_1

Cited by 3 publications

(4 citation statements)

References 78 publications

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“…They are used for the measurements of mass, stiffness, viscosity, and other physical properties even an individual cell [3]. As Silicon-based MEMS sensors have the limitation of operating at high temperatures high temperature-resistant hard coatings like SiC were used as mentioned above Thin films memristor made from SiC have also shown good binary resistive memory switching which is beneficial for memory devices [4]. The Individual SiC phase is a valence crystal in which neighboring atoms share their valence electrons through the creation of strong homopolar or covalent bonds.…”

Section: Introductionmentioning

confidence: 99%

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

BHATTACHARYYA

2024

Preprint

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Ti-B-Si-C-B-N/Si coatings are VLSI compatible at a cheaper rate. These multi-component nanocomposite coating comprising of a mixture of different phases viz., TiN, TiB2, cBN, Ti-C, Si3N4, β-C3N4 and different hybridized carbon grown over an amorphous phase has also been useful for MEMS as microgrippers dielectric barriers in VLSI fabrication and interconnects. The nature of crystallization which occurred on the surface of magnetron sputtered Ti-B-Si-C(N) and Si-C-N on silicon (100) substrates was studied using Transmission electron Microscopy and the complex crystalline configuration was attempted to analyze using image analysis and diffraction patterns. The standard deviations occurring in the nanoindentation P-h plots were put into effect to explain the small-scale fractural features during the indentation process. The electrical conduction associated with nanoindentation indenter tip with the diverse crystalline morphology of the magnetron deposited coatings which involves indenter sharpness and small-scale fracture as well has also been studied to the effect of its use for device fabrication.

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Section: Introductionmentioning

confidence: 99%

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

BHATTACHARYYA

2024

Preprint

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“…In reverse to the approach of top-down fabrication, mechanical probes can be fabricated 'bottom-up' by the assembly of nano-or microscale structures that have been synthesized molecule-by-molecule (Pu and Hu, 2022). Such synthesized structures are almost unrestricted in their composition, or may be designed with composition gradients, can have atomically smooth facets, with very low defect densities, and with well-defined surface termination (Ozin and Arsenault, 2015;Bohidar and Rawat, 2017).…”

Section: Introductionmentioning

confidence: 99%

“…These methods often deposit a catalyst at a location of interest on the probe, followed by deposition-based growth of the structure of interest (Hernández-Vélez, 2006;Cao and Liu, 2008). In contrast, grow-and-place strategies synthesize the structure externally, and then use a secondary assembly step to integrate the structure into the probe (Shi et al, 2016;Pu and Hu, 2022). Parallel assembly methods offer the potential to be upscaled for industrial level fabrication, and therefore can be considered the end goal (Yerushalmi et al, 2007;Wang and Gates, 2009).…”

Section: Introductionmentioning

confidence: 99%

Advances in assembled micro- and nanoscale mechanical contact probes

et al. 2022

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The micro- and nanoscale characterization and mapping of surface properties and surface behaviour is critical to both physical and biological science. Mechanical contact probes are a critical tool for investigating surface and interface science, and have seen greater development and a diversification in recent years. In particular, mechanical contact probes that have been fabricated from the bottom-up by the assembly of synthesized nano- or microscale materials can provide enhanced functionality and sensitivity over traditional microcantilevers. This work provides an overview of recent developments in the field of assembled micro- and nanoscale mechanical contact probes, with a specific focus on three probe types: colloidal particle probes with high aspect ratio and a high lateral sensitivity, one-dimensional probes comprising of nanotube and/or nanowire deflection elements, and liquid metal-based probes. For each probe type, the state-of-the-art is reviewed, and their assembly, design, functionality and capabilities are discussed. An outlook on the future direction of probe development and potential applications is also given.

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“…Microelectromechanical systems (MEMS) are generally known as miniaturized mechanical and electro-mechanical devices that are commonly fabricated by adding new structures or by specifically etching away parts of the silicon chip [1,2]. NEMS stands for nanoelectromechanical systems, an important feature of NEMS devices is that it has at least one dimension smaller than 100 nm [3,4]. As device dimensions decrease, NEMS show new physical properties, namely increase in resonance frequency, improvement in force, mass and displacement sensitivity and low-temperature behaviour that reflects quantum limit, which may dominate the operation of the devices [5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications

Saipriya¹,

Deekshitha²,

Shreya³

et al. 2022

ECS Trans.

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Microelectromechanical systems (MEMS) are generally known as miniaturized mechanical and electro-mechanical systems, whereas NEMS stands for nanoelectromechanical systems. Graphene is an atomically thin material that features unique properties, such as high carrier mobility, high mechanical strength, and piezoresistive electromechanical transduction, which makes it an extremely promising material for future MEMS and NEMS devices. Design and fabrication of MEMS/NEMS devices using graphene process includes trench etching, wafer backside etching, graphene transfer, and mass release, which are described in a comprehensive manner. This review provides interesting perspectives for lock-in detection of weak fluorescent signals, NEMS position detection, electromechanical control of the on-chip transmitter, and single-photon-level fast electromechanical optical modulation. There are various applications of MEMS/NEMS devices, namely radio frequency devices, optic NEMS, pressure sensors, inertial sensors, which have been discussed in detail. The review mainly focusses on the devices made up of graphene (atom-layer distance of ~0.335 nm) as a main electronic/mechanical material due to its remarkable mechanical and electrical (Young’s modulus of up to ~1 TPa cm2Vs-1) and charge-carrier mobility of up to 200,000, which makes it an extremely promising membrane and transducer material for MEMS/NEMS system applications. Modern MEMS/NEMS experiments utilize mechanical resonators to push the bounds of force and mass sensing, demonstrate novel electromechanical circuit applications, measure the structural properties of materials are also covered in this review.

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Tip-Based Nanofabrication for NEMS Devices

Cited by 3 publications

References 78 publications

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

Advances in assembled micro- and nanoscale mechanical contact probes

Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications

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