2018
DOI: 10.1038/s41598-018-30726-w
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TiOxNy Modified TiO2 Powders Prepared by Plasma Enhanced Atomic Layer Deposition for Highly Visible Light Photocatalysis

Abstract: In this work, TiN film deposited by plasma enhanced atomic layer deposition (PEALD) is adopted to modify the commercial anatase TiO2 powders. A series of analyses indicate that the surface modification of 20, 50 and 100 cycles of TiN by PEALD does not change the morphology, crystal size, lattice parameters, and surface area of TiO2 nano powders, but forms an ultrathin amorphous layer of nitrogen doped TiO2 (TiOxNy) on the powder surfaces. This ultrathin TiOxNy can facilitate the absorption of TiO2 in visible l… Show more

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Cited by 28 publications
(30 citation statements)
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“…. This result indicates that ultrathin ALD Fe 2 O 3 would not affect the crystal structure of TiO 2 , consistent with our previous finding 24,55 .…”
Section: Methodssupporting
confidence: 92%
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“…. This result indicates that ultrathin ALD Fe 2 O 3 would not affect the crystal structure of TiO 2 , consistent with our previous finding 24,55 .…”
Section: Methodssupporting
confidence: 92%
“…All samples exhibit low adsorption capacity of MO molecules. As reported in our previous work, MO is selected here for its stability under visible light irradiation in the absence of catalysts 24 . Figure 6 a shows the evolution of UV–vis absorption spectra of MO solution in the presence of pristine TiO 2 under visible light irradiation.…”
Section: Resultsmentioning
confidence: 99%
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“…It is well known that as a photocatalyst TiO 2 can be activated when absorbing photon energy (hv) that is greater than or equal to the bandgap energy (3.0 eV for rutile phase and 3.2 eV for anatase phase) between the valence band (VB) and the conductive band (CB) to form the electron-hole pairs (e − -h + ) [14,50]. Although it is a fact that non-thermal CO 2 plasma can generate UV radiation [14,18], its photon flux is too low to make any significant contribution to the activation of TiO 2 catalysts, as widely reported and demonstrated in various works [14,41,48].…”
Section: Discussionmentioning
confidence: 99%
“…To achieve this goal, attempts have been made to understand and modify the physical and chemical properties of TiO 2 , such as the slow-light effect in periodic TiO 2 photonic crystals [65] and the multi-reflection effect in semi-hollow TiO 2 spheres [66]. Attempts have also been made to improve TiO 2 by classic chemical element doping [67][68][69][70][71], dye sensitizing [72,73], formation of semiconducting junctions [74][75][76][77], localized surface plasmon resonance (LSPR) photosensitization [78,79], stoichiometric adjustment or coordination of surface atoms or surface oxygen vacancies [61,[80][81][82][83] and tuning inter-particle interactions of TiO 2 nanocrystals [84,85]. In particular, Ti 3+ -self-doped TiO 2 (Ti 3+ -TiO 2 ) such as blue-black TiO 2 has been found to induce high efficiency in visible-light-driven photocatalysis [86][87][88][89][90][91][92][93][94].…”
Section: Introductionmentioning
confidence: 99%