“…Anatase TiO 2 films have numerous interesting applications in optical coatings, optical waveguides, photo-decomposition of environmental pollutants, sensing, solar cells and electronic devices, etc [16,17,21]. There are numerous reports describing the fabrication of Ti thin films using techniques such as electron beam deposition [7], doctor blading [14], magnetron sputtering [15] sol-gel processing [6], surfactant template selfassembly [1], pulsed laser deposition [3], spray pyrolysis, etc. Among these fabrication methods, the electron beam deposition has many advantages, such as a uniform deposition over a relatively c 2014 Vietnam Academy of Science and Technology larger area, the freedom to choose substrate material and strong adhesion to substrate.…”