2011
DOI: 10.1016/j.jallcom.2011.03.030
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Metalorganic chemical vapor deposition of Ti–O–C–N thin films using TBOT as a promising precursor

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Cited by 8 publications
(4 citation statements)
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References 21 publications
(37 reference statements)
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“…3B–D . Figure 3B shows that Ti2p XPS peak shows two peaks at binding energy values of 458.9 eV and 464.6 eV which are ascribed to Ti 2p3/2 and Ti 2p1/2, respectively (Fouad et al 2011 ). The energy distance between the two peaks is 5.7 eV, which is characteristic of Ti 4+ oxidation state of TiO 2 compound (Hariharan et al 2020 ).…”
Section: Resultsmentioning
confidence: 99%
“…3B–D . Figure 3B shows that Ti2p XPS peak shows two peaks at binding energy values of 458.9 eV and 464.6 eV which are ascribed to Ti 2p3/2 and Ti 2p1/2, respectively (Fouad et al 2011 ). The energy distance between the two peaks is 5.7 eV, which is characteristic of Ti 4+ oxidation state of TiO 2 compound (Hariharan et al 2020 ).…”
Section: Resultsmentioning
confidence: 99%
“…Fouada et al prepared 𝑇𝑖 − 𝑂, 𝑇𝑖 − 𝑂 − 𝐶 and 𝑇𝑖 − 𝑂 − 𝐶 − 𝑁 films using tetrabutyl orthotitanate as a precursor by chemical vapor deposition (CVD) technique in presence of different gases, where titanium nitride (Ti2N and TiN) phases, TiO2 and TiC phases were formed [2], Linus et al applied titanium carbonitride (𝑇𝑖(𝐶, 𝑁)) films by CVD technique [3] and Barbara et al studied the development of multifunctional biomedical (𝑇𝑖𝑂 2 ) coatings doubly-doped with 𝐴𝑔 and 𝐶𝑎 ions by dipcoating method on steel to investigate many biological properties and corrosion [4] as well as using niobium oxide [5] and ceria by RF sputtering [6,7].…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, titanium carbide (TiC) is a very attractive material due to its interesting mechanical, chemical and physical properties. It is characterized by a high hardness and high melting point [4], excellent electrical and thermal conductivity, high chemical and thermal stability and good wear and corrosion resistance [5][6][7]. Owing to combination of properties this material has been extensively investigated and thoroughly used in many technological applications [7,8].…”
Section: Introductionmentioning
confidence: 99%