TiO_2−x films for bolometer applications: recent progress and perspectives

Abstract

The bolometer is widely used in military and civilian infrared imaging due to its advantages of non-cooling, small size and portability. Thermosensitive materials seriously affect the performance of bolometers. As a kind of heat-sensitive material, the TiO2-x material has the advantages of good thermal stability, large-area preparation, and compatibility with the complementary metal-oxide semiconductor (CMOS) process. However, there is almost no review on the application of titanium oxide for bolometers. In this paper, we introduce the bolometer's main thermal and photoelectric performance parameters and the critical technologies to manufacture the bolometer. Finally, we will particularly emphasize the effects of preparation process parameters of TiO2 on the performance parameters temperature coefficient of resistance (TCR), 1/f noise, etc., were studied.

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

“…(h) Resonant optical cavity structure. Reproduced from ref . Available under a creative commons license.…”

A spectrally selective visible microbolometer based on planar subwavelength thin films

“…This change can be detected by monitoring a bias current. Bolometric thermal detectors have been widely used in various applications [1][2][3][4] ranging from thermal imaging and radiation temperature measurement to night vision and aerial navigation. In traditional bolometers, the incident radiation power is converted to heat by additional integrated absorbers that are bulky (compared to the operating wavelength) and generally have a at broadband spectral response.…”

Carbon Nanotube-Based Uncooled Bolometers: Advances and Progress

“…However, one limiting factor is that the synthesis of this material requires critical oxygen and temperature conditions and suitable sputter targets . Another material system that has shown good promise for use as an uncooled BM is the nonstoichiometric TiO 2– x /TiO x films. − These films are mostly grown with reactive magnetron sputtering or ALD with a near-RT absolute TCR value as high as 9%/K . Thermal annealing and Nb doping have proved to be successful schemes toward improving the bolometric response of these Ti oxide films.…”

“…The field of BM, which started back in ∼1880 has seen much research right from fundamental material selection/design to smart technological methodologies. From the material perspective, many surprises are still underway with the search for better and new thermistor materials, e.g., FePSe 3 , TiO 2– x , graphene, − Mn–Ni–Co–O, ZnO − etc. CNT as an advanced material has already made its footprint in laboratory research to market in technology-relevant areas, such as batteries and additive manufacturing .…”