Time Efficient Evaluation of Multi-axis MEMS Gyroscope Using Three-dimensional Test Methodology

Iqbal, Faisal; Din, Hussamud; Lee, Byeungleul

doi:10.5573/jsts.2019.19.6.600

Cited by 2 publications

(2 citation statements)

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“…Cross-axis sensitivity for a gyroscope is defined as the sensor output on a sense-axis due to the applied input angular rate in the orthogonal axis expressed in percentage. Mathematically, cross-axis sensitivity for a three-axis gyroscope can be described by Equation (1) [ 24 , 31 ].

…”

Section: Cross-axis Sensitivity Modelingmentioning

confidence: 99%

“…A 3-axis MEMS gyroscope was presented with a catch-and-release structure with four coupled drive masses with confirmed cross-axis sensitivity of less than

[ 23 ]. An experimental 3D test-setup, presented for evaluating multi-axis MEMS gyroscope and cross-axis sensitivity for x, y, and z gyroscopes, was measured to be

, and

respectively, and 3-D fixture design angles were considered the main error source for cross-axis sensitivity [ 24 ]. A MEMS surface micro-machined gyroscope with

cross-axis sensitivity was presented and claimed that this small value of CAS is due to the large frequency split between operational and out-of-plane frequencies [ 25 ].…”

Section: Introductionmentioning

confidence: 99%

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Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

2021

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In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

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…”

Section: Cross-axis Sensitivity Modelingmentioning

confidence: 99%

“…A 3-axis MEMS gyroscope was presented with a catch-and-release structure with four coupled drive masses with confirmed cross-axis sensitivity of less than

[ 23 ]. An experimental 3D test-setup, presented for evaluating multi-axis MEMS gyroscope and cross-axis sensitivity for x, y, and z gyroscopes, was measured to be

, and

respectively, and 3-D fixture design angles were considered the main error source for cross-axis sensitivity [ 24 ]. A MEMS surface micro-machined gyroscope with

cross-axis sensitivity was presented and claimed that this small value of CAS is due to the large frequency split between operational and out-of-plane frequencies [ 25 ].…”

Section: Introductionmentioning

confidence: 99%