Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity

Din, Hussamud; Iqbal, Faisal; Lee, Byeungleul

doi:10.1016/j.sna.2021.113145

Cited by 4 publications

(3 citation statements)

References 27 publications

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“…In 1995, Bergveld first introduced the possibility of large-scale equipment miniaturization for chemical analysis [9]. As MEMS devices are currently present in all aspects of the daily life (e.g., image [10], touch [11,12], distance [13], pressure [14][15][16][17][18], temperature [19][20][21], and humidity [22][23][24][25] sensors, microphones [26][27][28][29], gyroscopes [30][31][32][33], accelerometers [34][35][36][37], and magnetometers [38][39][40]), the worldwide MEMS market is expected to grow to $25 billion by 2022 (Figure 1) [3,4,[41][42][43]. Reprinted from an open-access source [43].…”

Section: Introductionmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the biomedical field, especially in drug synthesis and delivery, microsurgery, microtherapy, diagnostics and prevention, artificial organs, genome synthesis and sequencing, and cell manipulation and characterization. Their tremendous potential resides in the advantages offered by their reduced size, including ease of integration, lightweight, low power consumption, high resonance frequency, the possibility of integration with electrical or electronic circuits, reduced fabrication costs due to high mass production, and high accuracy, sensitivity, and throughput. In this context, this paper aims to provide an overview of MEMS technology by describing the main materials and fabrication techniques for manufacturing purposes and their most common biomedical applications, which have evolved in the past years.

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Section: Introductionmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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“…Temperature-induced errors occur due to changes in the material properties of the selected material and electronic parts. In MEMS sensors, temperature-induced errors result in several other errors, such as spring softening, resonant frequency error, cross-axis sensitivity, and bias instability [ 17 , 18 , 19 , 20 ]. Among all the high-performance MEMS gyroscope specifications, bias stability is the first thing system designers must ensure to deliver performance [ 21 ].…”

Section: Introductionmentioning

confidence: 99%

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Din

Iqbal

Park

et al. 2022

Sensors

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The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-heater and a control system exploiting PID/PWM were used to compensate for the bias stability variations of a commercial MEMS IMU from BOSCH “BMI 088”. A micro-heater made of gold (Au) thin film is integrated with the commercial MEMS IMU chip. A custom-designed micro-machined glass platform thermally isolates the MEMS IMU from the ambient environment and is vacuum sealed in the leadless chip carrier (LCC) package. The BMI 088 built-in temperature sensor is used for temperature sensing of the device and the locally integrated heater. The experimental results reveal that the bias repeatability of the devices has been improved significantly to achieve the target specifications, making the commercial devices suitable for navigation. Furthermore, the effect of vacuum-packaged and non-vacuum-packaged devices was compared. It was found that the bias repeatability of vacuum-packaged devices was improved by more than 60%.

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“…Further, Coriolis acceleration and output amplitude of the drive axis are proportional to each other, therefore the main purpose of the control schemes of MEMS gyroscope is to maintain the amplitude of the steady oscillations. Furthermore, vibrating the drive axis through resonance can be the other aim of the controller [3].…”

Section: Introductionmentioning

confidence: 99%

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

Nasir

Ahmed

Aslam

et al. 2022

Preprint

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Microelectromechanical system (MEMS) devices face unique issues of control and measurement in contrast to conventional devices due to smaller size, lower manufacturing cost, and less power utilization. A MEMS gyroscope multi-agent system is one example of a MEMS device which have many industrial applications. Despite the significant industrial applications of MEMS gyroscope multi-agent systems such as airbag filling systems, stabilization of image, etc., it faces problems of stability and performance due to the existence of external disturbances, noise, and variations in the parameters. So, designing a consensus controller in the presence of uncertainties and disturbances is a challenging task. The basic purpose of this work is to investigate the issues faced by the MEMS gyroscope multi-agent system and propose a non-linear robust tracking and consensus control technique for the drive axis of the multi-agent system MEMS gyroscope. For this purpose, a controller is designed for the robust tracking and consensus control of MEMS gyroscope multi-agent system by the combination of H∞ consensus control and dynamic surface control approaches. The proposed H∞ consensus controller minimizes the external disturbance effects, makes the drive axis achieve resonance, and a tuning method is derived to tune the output response of the drive axis to the desired level. Further, we simulated a closed-loop system to discuss the controller features. In the last part of the paper, simulation examples are presented to verify the effectiveness of the proposed controller in the presence of uncertainties

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Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity

Cited by 4 publications

References 27 publications

Microelectromechanical Systems (MEMS) for Biomedical Applications

Microelectromechanical Systems (MEMS) for Biomedical Applications

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

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