Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on Beating

Bucken, Gerrit; Körner, Julia

doi:10.1109/jmems.2020.3008593

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2022

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“…In all experimental studies an increase in measurement signal strength and sensitivity by several orders of magnitude was found compared to a single sensitive microcantilever [8]. Furthermore, we have introduced a novel read-out method based on time-scale observation of sensor beating [9].…”

Section: Introductionmentioning

confidence: 95%

Co-Resonant Cantilevers for Materials Research and Sensor Applications

Körner

2022

2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro-and nanocantilever has to be carefully considered for applicationspecific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.

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Section: Introductionmentioning

confidence: 95%

Co-Resonant Cantilevers for Materials Research and Sensor Applications

Körner

2022

2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest

View full text Add to dashboard Cite

show abstract

Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on Beating

Cited by 1 publication

References 25 publications

Co-Resonant Cantilevers for Materials Research and Sensor Applications

Co-Resonant Cantilevers for Materials Research and Sensor Applications

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