2008
DOI: 10.1016/j.tsf.2007.11.097
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TiAlN film preparation by Y-shape filtered-arc-deposition system

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Cited by 14 publications
(6 citation statements)
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“…20b. That filter type combines two arc sources having a 45° beam deflection (two "knee" filters) [85,144]. The "X-Filter" is shown in Fig.…”
Section: Accepted Manuscriptmentioning
confidence: 99%
“…20b. That filter type combines two arc sources having a 45° beam deflection (two "knee" filters) [85,144]. The "X-Filter" is shown in Fig.…”
Section: Accepted Manuscriptmentioning
confidence: 99%
“…Single phase ion plasma vacuum arc TiN coatings are characterized by hard ness H ~ 22-24 GPa, a columnar microstructure, and an operational temperature reaching 550°C. The main ways to improve them associated both with the mod ernization of their formation method itself [1] and with the fabrication of multicomponent titanium nitride based coatings [2][3][4], including the introduc tion of elements not interacting with TiN into their composition [5], are outlined today. Being arranged along the boundaries of nuclei of the forming nitride phase, they restrict the possibility of their growth and made the crystalline structure of the ceramic compo nent finer.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, VAD is the main method for deposition of transition metal nitrides due to its high degree of ionization, high-energy particles (50-100 eV) and deposition rate as well as the wide range of cathode materials. Furthermore, evaporated coatings exhibit higher density and adhesion than sputtered coatings [11].…”
Section: Introductionmentioning
confidence: 99%