2012
DOI: 10.1016/j.tsf.2011.08.071
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(Ti,W,Cr)B2 coatings produced by dc magnetron sputtering

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Cited by 6 publications
(14 citation statements)
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“…Only long term anneals for several tens of hours leads to the formation of crystalline precipitates. However, no boride phases are found as expected from preliminary work, where coatings of the same composition and with the same sputter parameters were deposited on silicon substrates [27]. Instead, strong reflections of a cubic TiC phase (Fm-3m) [29] with a lattice parameter of a = (4.283 ± 0.005) Å occur.…”
Section: Resultssupporting
confidence: 52%
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“…Only long term anneals for several tens of hours leads to the formation of crystalline precipitates. However, no boride phases are found as expected from preliminary work, where coatings of the same composition and with the same sputter parameters were deposited on silicon substrates [27]. Instead, strong reflections of a cubic TiC phase (Fm-3m) [29] with a lattice parameter of a = (4.283 ± 0.005) Å occur.…”
Section: Resultssupporting
confidence: 52%
“…The coatings were deposited by dc magnetron sputtering using sputter targets of composition (Ti 0.49 W 0.51 )B 1.97 and (Ti 0.44 W 0.30 Cr 0.26 )B 1.95 [27]. The chemical composition of the targets was measured by inductively coupled plasma-optical emission spectroscopy.…”
Section: Methodsmentioning
confidence: 99%
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