Threshold voltages of Al&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt;/AlGaN/GaN and AlTiO/AlGaN/GaN metal-insulator-semiconductor devices

Le, Son Phuong; Ui, Toshimasa; Nguyen, Duong Dai; Suzuki, Toshimitsu

doi:10.7567/ssdm.2017.n-3-04

Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials 2017

DOI: 10.7567/ssdm.2017.n-3-04

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Threshold voltages of Al<sub>2</sub>O<sub>3</sub>/AlGaN/GaN and AlTiO/AlGaN/GaN metal-insulator-semiconductor devices

Son Phuong Le¹,

Toshimasa Ui²,

Duong Dai Nguyen³

et al.

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Threshold voltages of Al<sub>2</sub>O<sub>3</sub>/AlGaN/GaN and AlTiO/AlGaN/GaN metal-insulator-semiconductor devices

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