Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS

Nathan, M.; Golodnitsky, Diana; Yufit, Vladimir; Strauss, E.; Ripenbein, T.; Shechtman, I.; Menkin, Svetlana; Peled, E.

doi:10.1109/jmems.2005.851860

Cited by 187 publications

(157 citation statements)

References 13 publications

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“…With typical values of d = 50 μ m, s = 10 μ m and t = 500 μ m a surface area enhancement close to 23 is obtained, when compared to a single sided planar battery. [ 177 ] The advantages of this production concept are that it consists of techniques which are reasonably cheap to apply, since microchannel substrates are readily available, and relatively simple preparation methods are applied. Another benefi t of this concept is that the feasibility has already been proven and results for working devices have been published.…”

Section: D Batteries Based On Microchannel Platesmentioning

confidence: 99%

“…[ 177 ] used a soda-lime glass microchannel plate as basis for their 3D micro-battery. This plate had a thickness of 500 μ m with pores through it, having an average diameter of 50 μ m. The surface area enhancement of this 3D substrate is 20-30 compared to a single-sided planar device.…”

Section: D Batteries Based On Microchannel Platesmentioning

confidence: 99%

“…[ 232 ] molybdenum oxysulfi de. [ 177 ] Alternative demonstrated cathode materials were electrodeposited copper- [ 244 ] and iron sulfi de. [ 245 ] The electrolyte in this device consisted of a hybrid polymer electrolyte: fi rst the cathode was coated with a polymer separator using successive impregnation and evacuation steps.…”

Section: Three-dimensional Architectures Based On Aerogelsmentioning

confidence: 99%

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All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Oudenhoven

Baggetto

Notten

2010

Advanced Energy Materials

691

638

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With the increasing importance of wireless microelectronic devices the need for on-board power supplies is evidently also increasing. Possible candidates for microenergy storage devices are planar all-solid-state Li-ion microbatteries, which are currently under development by several start-up companies. However, to increase the energy density of these microbatteries further and to ensure a high power delivery, three-dimensional (3D) designs are essential. Therefore, several concepts have been proposed for the design of 3D microbatteries and these are reviewed. In addition, an overview is given of the various electrode and electrolyte materials that are suitable for 3D all-solidstate microbatteries. Furthermore, methods are presented to produce fi lms of these materials on a nano-and microscale.www.MaterialsViews.com REVIEW www.advenergymat.de

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Section: D Batteries Based On Microchannel Platesmentioning

confidence: 99%

Section: D Batteries Based On Microchannel Platesmentioning

confidence: 99%

Section: Three-dimensional Architectures Based On Aerogelsmentioning

confidence: 99%

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All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Oudenhoven

Baggetto

Notten

2010

Advanced Energy Materials

691

638

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“…Herein, we reviewed recent advancements in 3D Si-based full As shown in Figs. 14(a) and 14(b) [69][70][71], Nathan and co-workers first reported the production of battery supporting structures for 3D micro-LIBs using a process compatible with current Si-based semiconductor technologies. The full 3D microbattery was manufactured on the perforated Si substrate by using the wet chemistry method.…”

Section: Full-cell Unitmentioning

confidence: 99%

Fabrication of Si-based three-dimensional microbatteries: A review

Yue

Liu

2017

Front. Mech. Eng.

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High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nanoelectromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support substrates, electrodes or current collectors, electrolytes, and even batteries used in 3D layouts has become increasingly important in fabricating microbatteries with high energy, high power density, and wide-ranging applications. In this review, Si-based 3D microbatteries and related fabrication technologies, especially the production of micro-lithium ion batteries, are reviewed and discussed in detail in order to provide guidance for the design and fabrication.

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“…Efforts to improve microbattery performance have focused on increasing the electrode surface area and active material loading in the third dimension. Electrodes based on high-aspect-ratio micropillar structures, realized via methods including electrodeposition, polymer pyrolysis, and vapor deposition techniques, have been demonstrated (10)(11)(12)(13)(14). Despite the improved energy density compared with 2D batteries, because the micropillar electrodes are solid, the power and effective energy density is still limited due to the resultant long ion and electron diffusion pathways.…”

mentioning

confidence: 99%

Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

Ning

Zhang

et al. 2015

Proc. Natl. Acad. Sci. U.S.A.

193

165

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As sensors, wireless communication devices, personal health monitoring systems, and autonomous microelectromechanical systems (MEMS) become distributed and smaller, there is an increasing demand for miniaturized integrated power sources. Although thinfilm batteries are well-suited for on-chip integration, their energy and power per unit area are limited. Three-dimensional electrode designs have potential to offer much greater power and energy per unit area; however, efforts to date to realize 3D microbatteries have led to prototypes with solid electrodes (and therefore low power) or mesostructured electrodes not compatible with manufacturing or on-chip integration. Here, we demonstrate an on-chip compatible method to fabricate high energy density (6.5 μWh cm −2 ·μm −1 ) 3D mesostructured Li-ion microbatteries based on LiMnO 2 cathodes, and NiSn anodes that possess supercapacitor-like power (3,600 μW cm −2 ·μm −1 peak). The mesostructured electrodes are fabricated by combining 3D holographic lithography with conventional photolithography, enabling deterministic control of both the internal electrode mesostructure and the spatial distribution of the electrodes on the substrate. The resultant full cells exhibit impressive performances, for example a conventional light-emitting diode (LED) is driven with a 500-μA peak current (600-C discharge) from a 10-μm-thick microbattery with an area of 4 mm 2 for 200 cycles with only 12% capacity fade. A combined experimental and modeling study where the structural parameters of the battery are modulated illustrates the unique design flexibility enabled by 3D holographic lithography and provides guidance for optimization for a given application.energy storage | microelectronics | miniature batteries | lithium-ion batteries | interference lithography M icroscale devices typically use power supplied off-chip because of difficulties in miniaturizing energy storage technologies (1, 2). However, a miniaturized on-chip battery would be highly desirable for applications including autonomous microelectromechanical systems (MEMS)-based actuators, microscale wireless sensors, distributed monitors, and portable and implantable medical devices (3-8). For many of the applications, high energy density, high power density (charge and/or discharge), or some combination of high energy and power densities is required, all characteristics which can be difficult to achieve in a microbattery due to size and footprint restrictions, and process compatibilities with the other steps required for device fabrication. Although 2D thin-film microbatteries (typical thickness of a few micrometers) can deliver high power, they require large (often cm 2 ) footprints to provide reasonable energies (9). Making the electrodes thicker boosts the theoretical areal energy density but the resultant increases in electron and ion diffusion lengths reduce the effective power and energy densities. Efforts to improve microbattery performance have focused on increasing the electrode surface area and active material loading...

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Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS

Cited by 187 publications

References 13 publications

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Fabrication of Si-based three-dimensional microbatteries: A review

Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

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