2008
DOI: 10.1109/tps.2008.923902
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Three-Dimensional Striations of a Glow Discharge

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Cited by 16 publications
(11 citation statements)
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“…H2 + e - H2 + + 2e -(3) H2(v=0) + e - H2(v=1) + e -(4) H2(v) + e - H2(v+1) + e - (5) H2(v) + e - H + H -(6) H2 + + e - 2H 7H -+ H  H2 + e -(8) H -+ H2 +  H2 + H…”
Section: B Hydrogen Plasma Chemistry and The Double Layersunclassified
“…H2 + e - H2 + + 2e -(3) H2(v=0) + e - H2(v=1) + e -(4) H2(v) + e - H2(v+1) + e - (5) H2(v) + e - H + H -(6) H2 + + e - 2H 7H -+ H  H2 + e -(8) H -+ H2 +  H2 + H…”
Section: B Hydrogen Plasma Chemistry and The Double Layersunclassified
“…The formation of alternating dark and bright regions (striations) in the positive column of a glow discharge is a universal property of discharges in tubes [1]. This phenomenon is observed in atomic and molecular gases.…”
Section: Introductionmentioning
confidence: 99%
“…To monitor the temperature and the process of the plasma processing apparatus, transparent window glass has been placed in the apparatus and quartz has been applied commercially for its high transparency and strong chemical durability [6][7][8]. However, quartz is very vulnerable to fluorine plasma, because it mainly consists of SiO 2 , and Si atoms can be very easily vaporized by the fluorine plasma [9].…”
Section: Introductionmentioning
confidence: 99%