2001
DOI: 10.1063/1.1351533
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Three-dimensional photonic crystals based on macroporous silicon with modulated pore diameter

Abstract: We report on the fabrication and optical characterization of a three-dimensional (3D) photonic crystal on the basis of macroporous silicon. The structure consists of a 2D array of air pores in silicon whose diameter is varied (modulated) periodically with depth. The bandstructure of the resulting 3D hexagonal photonic crystal is calculated and compared with transmission measurements. The described structure allows to adjust the dispersion relation along the pore axis almost independently from the dispersion re… Show more

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Cited by 147 publications
(88 citation statements)
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“…Then, a square-array of perfectly ordered pores were electrochemically etched in 5% HF aqueous solution, with a small amount of ethanol for wetting purposes, at a controlled solution temperature of 10 ºC. During the etching, an in-depth modulation of the pores' diameter was introduced by modulating in time the etching photocurrent [21] (fig 1b).…”
Section: Sample Fabricationmentioning
confidence: 99%
See 1 more Smart Citation
“…Then, a square-array of perfectly ordered pores were electrochemically etched in 5% HF aqueous solution, with a small amount of ethanol for wetting purposes, at a controlled solution temperature of 10 ºC. During the etching, an in-depth modulation of the pores' diameter was introduced by modulating in time the etching photocurrent [21] (fig 1b).…”
Section: Sample Fabricationmentioning
confidence: 99%
“…Three-dimensional macroporous structures behave as photonic crystals [21,22], and exhibit interesting thermal emission characteristics [26][27][28]; however, they are not good candidates for TPV applications since it is very difficult to efficiently reduce thermal emission at large wavelength bands [28]. In order to take advantage of the good thermal stability of crystalline silicon 3D structures we decided to deposit a conformal thin metal layer over the structure.…”
Section: Sample Fabricationmentioning
confidence: 99%
“…Thus, by modulating the illumination intensity, the internal microstructure, and thus local refractive index of the sample is controlled. [35][36][37] This fabrication technique presents several advantages, perhaps the most significant of which is that the structure is formed from silicon, which has a high refractive index and is very well understood. There is the possibility for excellent control of the pore shape, [38] since the structure in the zaxis can be controlled independently of the other two axes.…”
mentioning
confidence: 99%
“…A very interesting application of LIL is the manufacturing of photonic crystals (PC) [6,8,15] and it has been implemented for applications like filters [16], waveguides [17], resonant cavities [18], PC-based optical elements [19] and light management in thin film solar cells [20]. The concept of photonic crystal was born in the late 1980s [21,22].…”
Section: Introductionmentioning
confidence: 99%