Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

Sato, Hiroki; Houshi, Y.; Shoji, Shuichi

doi:10.1007/s00542-004-0400-9

Cited by 20 publications

(18 citation statements)

References 7 publications

(6 reference statements)

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“…Oblique SU-8 cylinders, embedded channels, bridges, V-grooves and truncated cones with aspect ratios >4 have been fabricated using 100 µm thick SU-8 layers and a conventional UV mask aligner (figure 10(a)) [111]. Multiple inclined UV exposures along different axes can be exploited to generate complex 3D structures (figure 10(b)) [22,111,112]. Tilted exposure can also be combined with vertical exposure to create asymmetric pillars with vertical and inclined sidewalls [113].…”

Section: By Inclined/rotated Lithographymentioning

confidence: 99%

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

Campo¹,

Greiner²

2007

J. Micromech. Microeng.

728

514

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SU-8 has become the favourite photoresist for high-aspect-ratio (HAR) and three-dimensional (3D) lithographic patterning due to its excellent coating, planarization and processing properties as well as its mechanical and chemical stability. However, as feature sizes get smaller and pattern complexity increases, particular difficulties and a number of material-related issues arise and need to be carefully considered. This review presents a detailed description of these effects and describes reported strategies and achieved SU-8 HAR and 3D structures up to August 2006.

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Section: By Inclined/rotated Lithographymentioning

confidence: 99%

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

Campo¹,

Greiner²

2007

J. Micromech. Microeng.

728

514

View full text Add to dashboard Cite

show abstract

“…For fabrication, we were inspired by work on angled microstructures unrelated to adhesion that used multiple angled exposures in SU-8 photoresist to create interesting three-dimensional geometries (Han et al 2004;Sato et al 2004;Yoon et al 2006). Using thick films of SU-8, arrays of wedge-shaped cavities were created as a reusable mould for casting elastomeric polymers.…”

Section: Fabricationmentioning

confidence: 99%

A microfabricated wedge-shaped adhesive array displaying gecko-like dynamic adhesion, directionality and long lifetime

Parness

Soto

Esparza

et al. 2009

J. R. Soc. Interface.

247

239

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Gecko adhesion has become a paradigmatic example of bio-inspired engineering, yet among the many gecko-like synthetic adhesives (GSAs), truly gecko-like performance remains elusive. Many GSAs have previously demonstrated one or two features of the gecko adhesive. We present a new wedge-shaped GSA that exhibits several gecko-like properties simultaneously: directional features; zero force at detachment; high ratio of detachment force to preload force; non-adhesive default state; and the ability to maintain performance while sliding, even after thousands of cycles. Individual wedges independently detach and reattach during sliding, resulting in high levels of shear and normal adhesion during drag. This behaviour provides a non-catastrophic failure mechanism that is desirable for applications such as climbing robots where sudden contact failure would result in serious falls. The effects of scaling patch sizes up to tens of square centimetres are also presented and discussed. Patches of 1 cm 2 had an adhesive pressure of 5.1 kPa while simultaneously supporting 17.0 kPa of shear. After 30 000 attachment/detachment cycles, a patch retained 67 per cent of its initial adhesion and 76 per cent of its initial shear without cleaning. Square-based wedges of 20 mm and 50 mm are manufactured in a moulding process where moulds are fabricated using a dual-side, dual-angle lithography process on quartz wafers with SU-8 photoresist as the mould material and polydimethylsiloxane as the cast material.

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“…A lot of methods are there to fabricate them. One of the methods exploits the simple photolithography procedure, where the sample is exposed from backside with different angles and multiple exposures around the axes give high aspect ratio 3D structures as output [16]. Several exposure methods have been discussed where the stage or exposure angle should be controlled manually, which consumes a lot of time and lacks precision.…”

Section: Introductionmentioning

confidence: 99%

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

et al. 2020

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This paper demonstrates a 3D microlithography system where an array of 5 mm Ultra Violet-Light Emitting Diode (UV-LED) acts as a light source. The unit of the light source is a UV-LED, which comes with a length of about 8.9 mm and a diameter of 5 mm. The whole light source comprises 20 × 20 matrix of such 5 mm UV-LEDs giving a total number of 400 LEDs which makes it a very favorable source with a large area for having a batch production of the desired microstructures. This light source is able to give a level of precision in microfabrication which cannot be obtained using commercial 3D printers. The whole light source performs continuous rotational movement once it is turned on. This can also move up and down in a vertical direction. This multidirectional light source also comprises a multidirectional sample holder. The light source teaming up with the multidirectional sample holder highly facilitates the process of fabrication of a huge range of 3D structures. This article also describes the different levels of characterization of the system and demonstrates several fabricated 3D microstructures including high aspect ratio vertical micro towers, twisted turbine structures, triangles, inclined pillar ‘V’ structures, and hollow horn structures as well.

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Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

Cited by 20 publications

References 7 publications

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

A microfabricated wedge-shaped adhesive array displaying gecko-like dynamic adhesion, directionality and long lifetime

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

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