Proceedings IEEE Micro Electro Mechanical Systems an Investigation of Micro Structures, Sensors, Actuators, Machines and Roboti
DOI: 10.1109/memsys.1994.555588
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Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography

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Cited by 93 publications
(56 citation statements)
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“…Circles with a diameter of 200 Am were centered on the analysis cavities and etched through the silicon substrate. The backside fluid channels and fluid interfaces were created using stereolithography (23). The fluid interface design incorporated a network of 800-Am-wide fluid channels where each channel covered two analysis cavities.…”
Section: Methodsmentioning
confidence: 99%
“…Circles with a diameter of 200 Am were centered on the analysis cavities and etched through the silicon substrate. The backside fluid channels and fluid interfaces were created using stereolithography (23). The fluid interface design incorporated a network of 800-Am-wide fluid channels where each channel covered two analysis cavities.…”
Section: Methodsmentioning
confidence: 99%
“…1). Since Ikuta et al introduced this technology in the early 1990s, many attempts have been made to apply it in various fields, such as lab-on-achip, micro-actuators, and prototype fabrication (15,16). MSTL enables the fabrication of 3D free-form structures at the micron scale, and the inner architecture can also be precisely controlled using CAD/CAM technology such as with SL.…”
Section: Stereolithography (Sl)mentioning
confidence: 99%
“…They used a laser spot focused to a 5-μm diameter and the resin vat is scanned underneath it to cure a layer. Examples of devices built with this method include tubes, manifolds, and springs and flexible microactuators [44] and fluid channels on silicon [45]. Takagi and Nakajima [46] have demonstrated the use of this technology for connecting MEMS gears together on a substrate.…”
Section: Vector Scan Micro-vat Photopolymerizationmentioning
confidence: 99%