Three-dimensional imaging of a silicon flip chip using the two-photon optical-beam induced current effect

Ramsay, E.; Reid, Derryck T.; Wilsher, K.

doi:10.1063/1.1491301

Cited by 37 publications

(18 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The details of the prescription used to design the correct s-SIL for imaging at a given sub-surface depth have already been discussed. In a further analogy with two-photon fluorescence microscopy, we have also shown that the TOBIC effect can provide a means of generating ultra-high 2D and, in addition, 3D resolved imaging because the generation of significant photocurrent only occurs within one confocal parameter of the focused spot [2,21,67,68]. The results are illustrated in Figures 12-14 below.…”

Section: Solid Immersion Lens Microscopy Using Tobic Imagingmentioning

confidence: 71%

Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

View full text Add to dashboard Cite

Abstract. Solid immersion lens (SIL) microscopy combines the advantages of conventional microscopy with those of near-field techniques, and is being increasingly adopted across a diverse range of technologies and applications. A comprehensive overview of the state-of-the-art in this rapidly expanding subject is therefore increasingly relevant. Important benefits are enabled by SIL-focusing, including an improved lateral and axial spatial profiling resolution when a SIL is used in laser-scanning microscopy or excitation, and an improved collection efficiency when a SIL is used in a light-collection mode, for example in fluorescence micro-spectroscopy. These advantages arise from the increase in numerical aperture (NA) that is provided by a SIL. Other SIL-enhanced improvements, for example spherical-aberration-free sub-surface imaging, are a fundamental consequence of the aplanatic imaging condition that results from the spherical geometry of the SIL. The theory of SIL imaging exposes the unique properties of SILs that provide advantages in applications involving the interrogation of photonic and electronic nanostructures. Such applications range from the sub-surface examination of the complex three-dimensional microstructures fabricated in silicon integrated circuits, to quantum photoluminescence and transmission measurements in semiconductor quantum dot nanostructures.

show abstract

Section: Solid Immersion Lens Microscopy Using Tobic Imagingmentioning

confidence: 71%

Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

View full text Add to dashboard Cite

show abstract

“…In our work we make use of this fact, together with the resolution enhancing capabilities of a solid immersion lens, to achieve unprecedented optical resolutions using incident radiation with a wavelength of 1.53 lm. In a further analogy with two-photon fluorescence microscopy, we showed in previous work that the TOBIC effect can provide a means of three-dimensionally resolved imaging [14][15][16] because the generation of significant photocurrent only occurs within one confocal parameter of the focused spot. The axial resolution provided is similar to that obtained through confocal imaging methods in which the double-pass of the imaging system improves its axial resolution [17].…”

Section: Tobic Microscopymentioning

confidence: 94%

“…Using a peak detection procedure it is possible to exploit the focal dependence of the two-photon signal to acquire depth-resolved images that reveal the axial extent of subsurface circuit features [14,15]. The ray tracing analysis described in Section 1 provides essential information for calibrating the depth-resolved images obtained in this way using an s-SIL.…”

Section: Extension To Nanometric 3d Imagingmentioning

confidence: 99%

Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

Ramsay¹,

Serrels²,

Thomson³

et al. 2007

Microelectronics Reliability

Self Cite

View full text Add to dashboard Cite

“…However, to obtain depth resolution it is not enough to reach the buried interface and identify its contribution to the signal but the depth itself has to be measured. Use of two photon optical processes such as SHG or two-photon optical-beam-induced current [39,40] has permitted 3D imaging of circuit components in an integrated circuit with 1 mm lateral and 100 nm axial resolution. Differential confocal microscopy [41] has reached a depth resolution of 2 nm.…”

Section: Introductionmentioning

confidence: 99%

Depth resolved nonlinear optical nanoscopy

Mochán

López-Bastidas

Maytorena

et al. 2003

Physica Status Solidi (b)

View full text Add to dashboard Cite

An electromagnetic field forced to vary along a plane with a spatial scale d much smaller than its free space wavelength l decays exponentially along its normal with a decay length $ d. This decay, similar to that of the wavefunction of tunneling electrons, has allowed the development of scanning near-field optical microscopes (SNOMs), reminiscent of scanning tunneling and atomic force microscopes, which have been able to resolve structures in the nanometer scale. However, existing SNOMs are unable to determine the depth below the surface from which the optical signals arise due to the monotonic decay of the optical evanescent probe fields. In this paper we study the optical second harmonic generation (SHG) produced by mixing of the evanescent fields produced by a SNOM tip. We show that employing an appropriately spatially-patterned tip, a non-monotonic non-linear probing field may be produced which has a maximum at a given distance beyond the tip, yielding a novel microscopy which may attain depth resolution with nanometric lengthscales. We estimate the size of the optical signal and we compare it with that arising in the usual SHG-based surface spectroscopy of centrosymmetric materials.

show abstract

Three-dimensional imaging of a silicon flip chip using the two-photon optical-beam induced current effect

Cited by 37 publications

References 6 publications

Solid immersion lens applications for nanophotonic devices

Solid immersion lens applications for nanophotonic devices

Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

Depth resolved nonlinear optical nanoscopy

Contact Info

Product

Resources

About