Three-dimensional direct-write lithography into photopolymer

Sullivan, Amy C.; Grabowski, Matthew W.; McLeod, Robert R.

doi:10.1364/ao.46.000295

Cited by 79 publications

(69 citation statements)

References 22 publications

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“…Such a model can then be applied to the study of photopolymer based holographic data storage 26,27 and hybrid optoelectronics fabrication. 28,29 .…”

Section: ͑1͒mentioning

confidence: 99%

Extended model of the photoinitiation mechanisms in photopolymer materials

Shui

Gleeson

Sabol

et al. 2009

Journal of Applied Physics

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In order to further improve photopolymer materials for applications such as data storage, a deeper understanding of the photochemical mechanisms which are present during the formation of holographic gratings has become ever more crucial. This is especially true of the photoinitiation processes, since holographic data storage requires multiple sequential short exposures. Previously, models describing the temporal variation in the photosensitizer (dye) concentration as a function of exposure have been presented and applied to two different types of photosensitizer, i.e., Methylene Blue and Erythrosine B, in a polyvinyl alcohol/acrylamide based photopolymer. These models include the effects of photosensitizer recovery and bleaching under certain limiting conditions. In this paper, based on a detailed study of the photochemical reactions, the previous models are further developed to more physically represent these effects. This enables a more accurate description of the time varying dye absorption, recovery, and bleaching, and therefore of the generation of primary radicals in photopolymers containing such dyes.

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“…Such a model can then be applied to the study of photopolymer based holographic data storage 26,27 and hybrid optoelectronics fabrication. 28,29 .…”

Section: ͑1͒mentioning

confidence: 99%

Extended model of the photoinitiation mechanisms in photopolymer materials

Shui

Gleeson

Sabol

et al. 2009

Journal of Applied Physics

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“…Recent innovation in polymer actuators [9], polymer electronics [8], polymer sensors [14], and manufacturing of precision 3D polymer structures using lithography and holography [21,16] might enable the creation of a physical substrate for soft autonomous materials. Advances in decentralized algorithms for self-organizing machines [1,15], understanding of self-organizing biological systems [5] and large networks [7], enable the embedded scalable computation required by autonomous materials.…”

Section: Introductionmentioning

confidence: 99%

Soft Autonomous Materials—Using Active Elasticity and Embedded Distributed Computation

Correll

Önal

Liang

et al. 2014

Springer Tracts in Advanced Robotics

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The impressive agility of living systems seems to stem from modular sensing, actuation and communication capabilities, as well as intelligence embedded in the mechanics in the form of active compliance. As a step towards bridging the gap between man-made machines and their biological counterparts, we developed a class of soft mechanisms that can undergo shape change and locomotion under pneumatic actuation. Sensing, computation, communication and actuation are embedded in the material leading to an amorphous, soft material. Soft mechanisms are harder to control than stiff mechanisms as their kinematics are difficult to model and their degrees of freedom are large. Here we show instances of such mechanisms made from identical cellular elements and demonstrate shape changing, and autonomous, sensor-based locomotion using distributed control. We show that the flexible system is accurately modeled by an equivalent spring-mass model and that shape change of each element is linear with applied pressure. We also derive a distributed feedback control law that lets a belt-shaped robot made of flexible elements locomote and climb up inclinations. These mechanisms and algorithms may provide a basis for creating a new generation of biomimetic soft robots that can negotiate openings and manipulate objects with an unprecedented level of compliance and robustness.

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“…Unfortunately, multiphoton absorption requires femtosecond pulse length for efficient excitation. Glass is the most used base material and has high environmental stability, but requires irradiances of 10 17 W m 22 or larger 1 and device thickness is restricted to the working distance of an oil-immersion objective. Most applications are sparse waveguide [4][5][6][7] devices, though dense 3D index patterns such as volume computer generated holograms 8 have been generated, but only contain 64 3 features.…”

Section: Introductionmentioning

confidence: 99%

“…A postexposure optical flood cure is then done to bleach remaining initiator and cross-link all remaining monomer. The low required dose (,100 mJ cm 22 ) and wavelength sensitivity (UV to near infrared) of these materials have lead to applications in optical data storage 16 with 1.6 TB capacity and 960 Mbit s 21 data rates, photonic devices such as waveguides, 17 holographic filters 18 and GRIN lense. 19 However, one-photon absorption in solid, thick materials does not yield complete control of the 3D index distribution due to diffraction.…”

Section: Introductionmentioning

confidence: 99%

Liquid deposition photolithography for submicrometer resolution three-dimensional index structuring with large throughput

et al. 2013

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Photonic devices increasingly require three-dimensional control of refractive index, but existing fabrication methods such as femtosecond micromachining, multilayer lithography and bulk diffusion can only address a select scale range, are often limited in complexity or thickness and have low throughput. We introduce a new fabrication method and polymeric material that can efficiently create mm 3 optical devices with programmable, gradient index of refraction with arbitrary feature size. Index contrast of 0.1 is demonstrated, which is 100 times larger than femtosecond micromachining, and 20 times larger than commercial holographic photopolymers. This is achieved by repetitive microfluidic layering of a self-developing photopolymer structured by projection lithography. The process has the unusual property that total fabrication time for a fixed thickness decreases with the number of layers, enabling fabrication 10 5 faster than femtosecond micromachining. We demonstrate the process by sequentially writing 100 layers to fabricate a mm thick waveguide array.

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Three-dimensional direct-write lithography into photopolymer

Cited by 79 publications

References 22 publications

Extended model of the photoinitiation mechanisms in photopolymer materials

Extended model of the photoinitiation mechanisms in photopolymer materials

Soft Autonomous Materials—Using Active Elasticity and Embedded Distributed Computation

Liquid deposition photolithography for submicrometer resolution three-dimensional index structuring with large throughput

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