2017
DOI: 10.1038/s41598-017-02865-z
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Three-Dimensional Anisotropic Metamaterials as Triaxial Optical Inclinometers

Abstract: Split-ring resonators (SRRs) present an attractive avenue for the development of micro/nano scale inclinometers for applications like medical microbots, military hardware, and nanosatellite systems. However, the 180° isotropy of their two-dimensional structure presents a major hurdle. In this paper, we present the design of a three-dimensional (3D) anisotropic SRR functioning as a microscale inclinometer enabling it to remotely sense rotations from 0° to 360° along all three axes (X, Y, and Z), by employing th… Show more

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Cited by 12 publications
(8 citation statements)
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“…Cubes that are 500 μm in size with symmetric X-shaped resonator segments were fabricated using a self-assembly process to experimentally demonstrate the use of the 3D OSRR design as isotropic octagrams (Figure ). The OSRRs were patterned on a cubic surface with transparent SU-8 2010 (MicroChem) panels and SPR 220-7.0 (MEGAPOSIT) hinges.…”
Section: Fabricationmentioning
confidence: 99%
See 1 more Smart Citation
“…Cubes that are 500 μm in size with symmetric X-shaped resonator segments were fabricated using a self-assembly process to experimentally demonstrate the use of the 3D OSRR design as isotropic octagrams (Figure ). The OSRRs were patterned on a cubic surface with transparent SU-8 2010 (MicroChem) panels and SPR 220-7.0 (MEGAPOSIT) hinges.…”
Section: Fabricationmentioning
confidence: 99%
“…Lastly, ∼21 μm thick polymer hinges of SPR 220-7.0 positive photoresist were patterned between the panels (Figure c). It should be noted that polymer-based materials should be used for hinges and panels since the presence of any other metallic components except the Au SRRs can lead to a distorted response with multiple anisotropic resonant peaks. , The Au SRRs are the only metallic resonant structures present, and the remainder of the polymer-based cube and hinges are transparent to the THz waves. The 2D structure before folding consists of six SU-8 panels with X-shaped symmetric Au resonators and SPR 220 hinges on top of the panels (Figure c).…”
Section: Fabricationmentioning
confidence: 99%
“…Therefore, it is necessary to rapidly reset the device with an initial value once conditions permit [24], [25]. The measurement methods used in accelerometer-based inclinometers utilize piezoresistive [8], [10], [28], fiber optical [29]- [32], capacitive [8], [21], [23], [33], [34], resonant [35]- [38], and thermal properties [39]. Although most of the inclinometers that utilize these methods are significantly affected by external factors, such as temperature, in measuring values [25]- [27], the capacitive-type inclinometers are relatively less affected by changes in temperature than the piezoresistive-type inclinometers [10].…”
Section: Introductionmentioning
confidence: 99%
“…Because of these advantages, thermal reflow of polymers has been utilized for building diverse microstructures such as spherical or cylindrical optical lenses, optical ring resonators, and fluidic channels . However, there is a substantial challenge in precisely controlling the extent of polymer reflow and achieving localized reflow, especially at the nanoscale, using currently available heat sources such as hot plates, ,, microwaves, and hot liquid baths, which supply thermal energy to the entire substrate (sample). Since the mass and volume of the substrate are usually much greater than that of the polymer-based nanostructure, the thermal energy stored in the substrate is much higher than the energy required for triggering nanoscale polymer reflow.…”
mentioning
confidence: 99%