1997
DOI: 10.1016/s0040-6090(97)00070-9
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Thin reactive LiF films for nuclear sensors

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Cited by 31 publications
(17 citation statements)
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“…The change in the crystal size is considerable. The same phenomenon has previously been observed for evaporated LiF thin films, as well as other fluorides deposited by ALD 18, 25–28, 32, 33. In addition, it has been noted that the mean grain size in evaporated LiF films increases linearly with respect to film thickness at approx.…”
Section: Resultssupporting
confidence: 83%
See 1 more Smart Citation
“…The change in the crystal size is considerable. The same phenomenon has previously been observed for evaporated LiF thin films, as well as other fluorides deposited by ALD 18, 25–28, 32, 33. In addition, it has been noted that the mean grain size in evaporated LiF films increases linearly with respect to film thickness at approx.…”
Section: Resultssupporting
confidence: 83%
“…Possibly the better adhesion is related to the smaller roughness of the film deposited at lower temperature. Evaporated 500 nm LiF films have been reported to adhere well to silicon substrates when the substrate temperature is kept above room temperature during the evaporation 32…”
Section: Resultsmentioning
confidence: 99%
“…The LiF thin films were analysed by X-ray diffraction (XRD), with the results shown in In addition, this result confirms the suggestion [19] that the (200) plane has the lowest surface energy and is the most dense; therefore, the films grow along this crystalline direction once the energy is sufficiently high to allow for atom displacement at the surface.…”
supporting
confidence: 75%
“…However it was depending on temperature. The early stages of CaF 2 growth on Si (1 1 1) revealed well-ordered row like structures of hetero-epitaxial layers [43] and textured crystalline LiF film like structures were prepared on a mono-crystalline Si substrates [44]. In these experiments, Si was deposited on various fluoride crystals and it was found that the alkaline atoms strongly reacted with the Si (1 1 1) daggling bonds [45,46].…”
Section: Resultsmentioning
confidence: 99%