Thin Mo Films Deposited and Analyzed Using Sub-Kev Noble Gas Ions

Kuur, J. van der; Melker, Ernst-Jan E.; Huijgen, Tom P.; Hoondert, W.H.B.; Bekking, Gerard T.W.M.; Beukel, A. van den; Thijsse, Barend J.

doi:10.1557/proc-396-587

Cited by 10 publications

(5 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The use of thermal helium desorption spectrometry, which has been employed to study the defects in single crystals [5][6][7][8] and thin films, [28][29][30] has been extended to in situ monitoring of the morphological changes upon heating in thin Cu films ͑10-300Å͒ deposited on Mo(100). It was found that the Cu films on Mo(100) undergo an island formation on annealing, indicating that these films are metastable at the deposition temperature of 300 K. The island formation is very pronounced, resulting in islands covering ϳ15% of the surface and a continuous one-or twomonolayer Cu film remaining on the rest of the substrate.…”

Section: Discussionmentioning

confidence: 99%

See 1 more Smart Citation

Defects and morphological changes in nanothin Cu films on Mo(100) studied by thermal helium desorption spectrometry

Venugopal

Seijbel

Pers

et al. 2004

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

Section: Discussionmentioning

confidence: 99%

“…[27][28][29][30] The base pressure of the setup was Ͻ1.0ϫ 10 −9 mbar. [27][28][29][30] The base pressure of the setup was Ͻ1.0ϫ 10 −9 mbar.…”

Section: Methodsmentioning

confidence: 99%

Defects and morphological changes in nanothin Cu films on Mo(100) studied by thermal helium desorption spectrometry

Venugopal

Seijbel

Pers

et al. 2004

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

“…12 The base pressure of the setup was 2.0ϫ 10 −10 torr ͑2.7ϫ 10 −8 Pa͒ after bakeout. Cu films ͑5 -200 Å͒ were deposited on a 0.05 m polished, polycrystalline Mo substrate ͑ 10.0ϫ 2.0 mm 2 , purity 99.95 wt %͒.…”

Section: Methodsmentioning

confidence: 99%

Defects and morphological changes in nanothin Cu films on polycrystalline Mo analyzed by thermal helium desorption spectrometry

Venugopal

Seijbel

Thijsse

2005

Journal of Applied Physics

View full text Add to dashboard Cite

Thermal helium desorption spectrometry ͑THDS͒ has been used for the investigation of defects and thermal stability of thin Cu films ͑5 -200 Å͒ deposited on a polycrystalline Mo substrate in ultrahigh vacuum. These films are metastable at room temperature. On heating, the films transform into islands, giving rise to a relatively broad peak in the helium desorption spectra. The temperature of this island formation is dependent on film thickness, being 417 K for 10 Å and 1100 K for a 200 Å film. The activation energy for island formation was found to be 0.3± 0.1 eV for 75 Å film. Grain boundaries have a strong effect on island formation. The defect concentration in the as-deposited films is ϳ5 ϫ 10 −4 , for films thicker than 50 Å and more for thinner films. Helium release from monovacancies was identified in the case of a 200 Å film. Helium release was also seen during sublimation of the Cu film ͑ϳ1350 K͒. Overlayer experiments were used to identify helium trapped close to the film surface. An increase of the substrate temperature during deposition resulted in a film that had already formed islands. Argon-ion assistance ͑250 eV͒ during film deposition with an ion/atom ratio of ϳ0.1 resulted in a significant enhancement of helium trapping in the films. The argon concentration in the films was found to be 10 −3 . The temperature of island formation was increased due to argon-ion assistance. The helium and argon desorption spectra are found to be similar, which is due to most of the helium becoming trapped in the defects created by the argon beam. The role of the Mo surface in affecting the defects at the film-substrate interface is investigated. The effect of variation of helium fluence and helium implantation energy is also considered. The present THDS results of Cu/poly-Mo are compared to those of Cu/ Mo͑100͒ and Cu/ Mo͑100͒ reported earlier.

show abstract

“…However, in the SEM we were unable to find argon even at the EDAX detection limit of about 0.2%. Moreover, it is known from the literature that, as a function of the argon-ion/molybdenum-atom arrival ratio, the concentration of argon will peak at an atomic concentration of about 10 −4 for a ratio between 0.03 and 0.08, and then decrease as this ratio increases due to re-sputtering of the implanted argon [48]. This means that for the EB films studied here, with argon-ion/molybdenum-atom arrival ratios of greater than 0.6, 0.01 at% argon is the maximum concentration we might expect based on the literature.…”

Section: Microstructurementioning

confidence: 99%

Activation analysis of deformation in evaporated molybdenum thin films

Yoder¹,

Elmustafa²,

Lin³

et al. 2003

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Using nanoindentation, we investigate hardening mechanisms in steered arc (SA) evaporated and electron-beam (EB) evaporated molybdenum thin films. Both films have columnar grains, with the column diameters ranging between 22 and 170 nm in the SA films and 30 and 40 nm in the EB films. The Hall-Petch relation is extended out to hardness values between 6 and 12 GPa. Analysis of nanoindentation creep data (creep, load relaxation, and rate change) reveals that, in the SA films, thermally activated glide is rate controlling, and that grain size has little effect on the underlying rate processes even down to 22 nm. There is evidence based on x-ray diffraction (and supported by the literature) that the EB films contain high densities of interstitial loops resulting from argon ion bombardment during deposition. The analysed creep data indicate that these loops affect the thermal activation of dislocations.

show abstract

Thin Mo Films Deposited and Analyzed Using Sub-Kev Noble Gas Ions

Cited by 10 publications

References 7 publications

Defects and morphological changes in nanothin Cu films on Mo(100) studied by thermal helium desorption spectrometry

Defects and morphological changes in nanothin Cu films on Mo(100) studied by thermal helium desorption spectrometry

Defects and morphological changes in nanothin Cu films on polycrystalline Mo analyzed by thermal helium desorption spectrometry

Activation analysis of deformation in evaporated molybdenum thin films

Contact Info

Product

Resources

About