“…Furthermore, the high entropic effect, sluggish diffusion, and lattice distortion in RHEA films contribute to the measured high hardness and Young’s modulus . The hardness of the CuMoTaWV RHEA film is found to be higher than that of refractory metals, such as W, Ta, and Mo thin films with a hardness of 14, 11.6, and 11.8 GPa, respectively. − In general, refractory metals are found to be harder than transition metals, such as Ni and Cu, with a hardness of 6.4 and 6 GPa, respectively, due to their strong bonding and crystal structure. , The hardness of CuMoTaWV was found to be even higher than those of previously reported bulk RHEAs, such as TiHfZrTaNb, with a hardness of 4.9 GPa, and RHEA films, such as NbMoTaW, TaNbHfZr, TiTaHfNbZr, and HfNbTiVZr, with a hardness of 16, 15, 12.5, and 9.2 GPa, respectively.…”