1984
DOI: 10.1155/1985/17659
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Thin Metal Film Sensors

Abstract: During the last decade some progress have been made in the field of sensors using thin film techniques.In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport parameters with various measurands are also useful for the design of metal film sensors. Difficulty arises in thin film techniques when structural defects are frozen in films.Intensive theoretical investigations are carried … Show more

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Cited by 5 publications
(2 citation statements)
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“…Their electrical properties 1, 2, morphology 3 and oxidation kinetics 4 were studied in terms of suitability as sensor. The latter aspect was summarized by Tellier 5 concerning sensing of gases, magnetic properties, thermal effects etc by thin metal films. Furthermore, great attention was dedicated to metal oxidation to understand the mechanisms and kinetics 6–11.…”
Section: Introductionmentioning
confidence: 99%
“…Their electrical properties 1, 2, morphology 3 and oxidation kinetics 4 were studied in terms of suitability as sensor. The latter aspect was summarized by Tellier 5 concerning sensing of gases, magnetic properties, thermal effects etc by thin metal films. Furthermore, great attention was dedicated to metal oxidation to understand the mechanisms and kinetics 6–11.…”
Section: Introductionmentioning
confidence: 99%
“…Various aspects of this problem are analyzed in the literature. Theoretical basis of sensorika for monolayer films set in work [1] in which the features of electronic properties of metal films that are widely used in sensors of temperature, strain and Hall effect. Resulting in the equations for electrical conductivity, thermoelectric power, Hall coefficient and strain coefficient of resistivity, which takes into account all possible mechanisms of electron scattering (by phonons and defects of the crystal structure, at external surfaces of the film and at the grain boundaries) can accurately predict the electronic properties of the films.…”
Section: Introductionmentioning
confidence: 99%