Thin Films of Molybdenum Disulfide Doped with Chromium by Aerosol-Assisted Chemical Vapor Deposition (AACVD)

Abstract

A combined single-source precursor approach has been developed for the deposition of thin films of Cr-doped molybdenum disulfide (MoS2) by aerosol-assisted chemical vapor deposition (AACVD). Tris­(diethyldithiocarbamato)­chromium­(III) can also be used for the deposition of chromium sulfide (CrS). Films have been analyzed by a range of techniques including scanning electron microscopy (SEM), energy dispersive X-ray (EDX) spectroscopy, Raman spectroscopy, and powder X-ray diffraction (pXRD) to elucidate film morphology, composition, and crystallinity. The presence of Cr in the MoS2 films produces a number of striking morphological, crystallographic, and nanomechanical changes to the deposited films. The chromium dopant appears to be uniform throughout the MoS2 from the scanning transmission electron microscopy (STEM) EDX spectrum imaging of nanosheets produced by liquid-phase exfoliation of the thin films in N-methyl-2-pyrollidone.

Aerosols: A Sustainable Route to Functional Materials

“…Another metal sulfide thin film that has been successfully deposited via AACVD is MoS 2 . [45] This is am aterial that displays excellent lubricity ands oi sc ommonly used as al ubricant in industrial applicationsi nw hich high temperatures and pressures are typical, at which point traditional organic lubricants would degrade. In this study [Mo(S 2 CN(C 2 H 5 ) 2 ) 4 ]w as used to deposit MoS 2 thin films.…”

Quasi-two-dimensional transition metal dichalcogenides: structure, synthesis, properties, and applications

“…¥ÑÒËÓÑÄÂÐËÇ ¥±® ÂÕÑÏÂÏË VI ÅÓÖÒÒÞ (Cr) ÒÓËÄÑ-AEËÕ Í ÔÕÓÖÍÕÖÓÐÞÏ ËÊÏÇÐÇÐËâÏ Ä ÅÇÑÏÇÕÓËË ÏÂÕÇÓËÂÎÂ, ÖÄÇÎËÚËÄÂÇÕ àÎÂÔÕËÚÐÞÇ ÔÄÑÌÔÕÄÂ Ë AEÇÎÂÇÕ ÇÅÑ ÏÑÓ×ÑÎÑ-ÅËá ÃÑÎÇÇ ÊÇÓÐËÔÕÑÌ [168]. ¥ÑÒËÓÑÄÂÐËÇ SnSe ÂÕÑÏÂÏË Ga, As ËÎË Sb ÒÓËÄÑAEËÕ Í ÒÑâÄÎÇÐËá ÒÑÎÖÒÓÑÄÑAEâÜËØ ÔÄÑÌÔÕÄ,  ÂÕÑÏÂÏË In ì ÒÑÎÖÏÇÕÂÎÎËÚÇÔÍËØ ÔÄÑÌÔÕÄ [169].…”

Synthesis and Properties of Two Dimensional Doped Transition Metal Dichalcogenides

“…Finally, the adsorbed precursors react and deposit on the substrate relatively uniformly, and the byproducts are diffused. Lewis et al (2015) fabricated chromium (Cr)-doped MoS 2 via AACVD. The precursor was prepared as a solution by mixing tetrakis(diethyldithiocarbamato)molybdenum(IV) (MoL 4 ) and tris(diethyldithiocarbamato)chromium(III) (CrL 3 ) and dissolving the mixture in 25 mL of tetrahydrofuran (THF).…”