Thin-Film Transistor and Ultra-Large Scale Integrated Circuit: Competition or Collaboration

Abstract

Thin-film transistor (TFT) and ultra-large scale integrated circuit (ULSIC) have been compared and discussed with respect to the development history, technology trends, and applications. Detailed issues on materials, processes, and devices in the largearea TFT array fabrication and nano-size metal-oxide-semiconductor field effect transistors (MOSFETs) composed ULSIC on large wafers were also examined. The TFT fabrication processes were originally derived from ULSIC. However, there are many unique large-area processes and theories developed during the study of the TFT array fabrication, which can greatly benefit the future large wafer ULSIC production process. Although their future applications will be in different areas, there are opportunities that TFTs can be integrated into ULSIC products to enhance the functions and performance.

Low-Temperature Fabricated TFTs on Polysilicon Stripes

“…1. An amorphous silicon layer (with typical thickness of 50-100 nm as common in poly-Si TFTs [16]) is deposited over parallel amorphous silicon lines, oriented in the laser-crystallization direction. During laser annealing, a lateral temperature gradient in the molten silicon will result.…”

Chronoamperometry Using Integrated Potentiostat Consisting of Poly-Si Thin-Film Transistors

“…P OLY-Si thin-film transistors (TFTs) [1] have been widely utilized for flat-panel displays, such as liquid-crystal displays [2], organic light-emitting diode displays [3], and electronic papers [4], as well as driver circuits and systemon-panel units [5] and recently applied to not only sensors [1] but also general electronics [6], such as information processors [7]. Moreover, novel applications have been ardently desired to realize giant-micro flexible electronics [6].…”

“…Moreover, novel applications have been ardently desired to realize giant-micro flexible electronics [6]. Therefore, cyclic voltammetry using an integrated potentiostat consisting of polySi TFTs has been lately reported as a concrete instance [8].…”

Extraction Technique of Trap Densities in Thin Films and at Insulator Interfaces of Thin-Film Transistors

“…T HIN-FILM transistors (TFTs) are key devices for giant microelectronics because they can be fabricated on large substrates at low cost [1]. Therefore, they are applied to not only flat-panel displays such as liquid-crystal displays [2], organic light-emitting diode displays [3], and electronic papers [4] but also photosensing devices such as ambient light sensors [5], image scanners [6], and artificial retinas [7], as well as general electronics such as information processors [8].…”