Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique

Schöning, Michael J.; Schmidt, Constance; Schubert, J.; Zander, W.; Mesters, S.; Kordoš, P.; Lüth, H.; Legin, Andrey; Seleznev, B.L.; Vlasov, Yu. G.

doi:10.1016/s0925-4005(00)00438-x

Cited by 52 publications

(22 citation statements)

References 11 publications

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“…To ensure the patterning of the different thin-film sensors on the silicon chip, a home-made Al mask has been used. The detailed PLD process is described elsewhere [9,10,13]. After cutting the wafer into single sensor chips of 10 mm * 10 mm, each sensor chip has been glued on a printed circuit board (PCB), wire-bonded and encapsulated by an epoxy resin (EPO-TEK 87-GT, Polytec).…”

Section: Fabrication Of the Chalcogenide Glass-based Thin-film Sensormentioning

confidence: 99%

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A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

Kloock

Mourzina

Schubert

et al. 2002

Sensors

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A first step towards a microfabricated potentiometric thin-film sensor array for the simultaneous detection of Pb 2+ , Cd 2+ and Cu 2+ has been realized. The sensitive layers used are on the basis of chalcogenide glass materials. These thin-film chalcogenide glass materials that consist of mixtures of Pb-Ag-As-I-S, Cd-Ag-As-I-S or Cu-Ag-As-Se have been prepared by pulsed laser deposition technique. The developed sensor array has been physically characterized by means of scanning electron microscopy and Rutherford backscattering spectrometry. The electrochemical sensor characterization has been performend by potentiometric measurements.

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Section: Fabrication Of the Chalcogenide Glass-based Thin-film Sensormentioning

confidence: 99%

“…Thus, a nearly perfect stoichiometric transfer from the target material to the silicon substrate can be assumed. Former investigations in terms of the thin-film composition, also done by the authors, are published elsewhere [9,10,13,14]. …”

Section: Physical Characterization Of the Chalcogenide Glass-based Thmentioning

confidence: 99%

A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

Kloock

Mourzina

Schubert

et al. 2002

Sensors

View full text Add to dashboard Cite

show abstract

“…Rather new method used is spin-coating technique [9,10]. By the means of the PLD technique, a potentiometric thin film sensor can be realized on the basis of chalcogenide glasses (in particular, Ag-As-S) [11].…”

Section: Introductionmentioning

confidence: 99%

Temperature studies of optical absorption in the sandwich structure based on (Ag3AsS3)0.6(As2S3)0.4 thin film and gold nanoparticles

Studenyak¹

2018

Semicond. Phys. Quantum Electron. Optoelectron.

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Abstract. (Ag 3 AsS 3 ) 0.6 (As 2 S 3 ) 0.4 thin films deposited using the thermal evaporation technique onto glass substrates previously covered with layers of gold nanoparticles were studied. Optical transmission spectra of the sandwich structure were studied within the temperature range 77-300 K. The absorption spectra in the region of its exponential behaviour were analyzed, the dispersion dependences of refractive index as well as the temperature dependences of the energy pseudogap and Urbach energy were investigated. The disordering processes in the sandwich structure were discussed. The comparative analyses of optical parameters in single (Ag 3 AsS 3 ) 0.6 (As 2 S 3 ) 0.4 layer and in the sandwich structure were performed.

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“…A rather new method used is spincoating technique [9,10]. By the means of the PLD technique, a potentiometric thin film sensor can be realized on the basis of chalcogenide glasses (in particular Ag-As-S) [11].…”

Section: Introductionmentioning

confidence: 99%

Temperature studies of optical parameters in (Ag3AsS3)0.6(As2S3)0.4 thin films

Studenyak¹

2015

Semicond. Phys. Quantum Electron. Optoelectron.

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Abstract. (Ag 3 AsS 3 ) 0.6 (As 2 S 3 ) 0.4 thin films were deposited onto a silica substrate by using rapid thermal evaporation. The surfaces of the films were covered with Ag-rich crystalline micrometer-sized cones. The optical transmission spectra of thin films were studied within the temperature range 77…300 K. The absorption spectra in the region of its exponential behaviour were analysed, the dispersion dependences of refractive index as well as the temperature dependences of energy position of absorption edge and Urbach energy were investigated.

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Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique

Cited by 52 publications

References 11 publications

A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

Temperature studies of optical absorption in the sandwich structure based on (Ag3AsS3)0.6(As2S3)0.4 thin film and gold nanoparticles

Temperature studies of optical parameters in (Ag3AsS3)0.6(As2S3)0.4 thin films

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