A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

Kloock, Joachim P.; Mourzina, Yulia; Schubert, J.; Schöning, Michael J.

doi:10.3390/s20900356

Cited by 34 publications

(18 citation statements)

References 14 publications

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“…After these steps, the whole wafer was cut into single chips with a length of 20 mm*10 mm. The fabrication process of the sensor arrays is described in detail in [13].…”

Section: Methodsmentioning

confidence: 99%

“…As a first step, three different chalcogenide glass materials for the detection of Pb -ions in aqueous solution have been integrated onto one silicon chip. The thin films have been physically characterized by means of Rutherford backscattering spectrometry, scanning electron microscopy and video microscopy [7][8][9][10][11][12][13]. The electrochemical sensor characterization has been performed by means of ion-selective potentiometry and impedance spectroscopy.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation

Kloock

Mourzina

Ermolenko

et al. 2004

Sensors

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Abstract:Chalcogenide glasses offer an excellent "challenge" for their use and implementation in sensor arrays due to their good sensor-specific advantages in comparison to their crystalline counterparts. This paper will give an introduction on the preparation of chalcogenide glasses in the thin-film state. First, single microsensors have been prepared with the methods of semiconductor technology. In a next step, three microsensors are implemented onto one single silicon substrate to an "one chip" sensor array. Different ionselective chalcogenide glass membranes (PbSAgIAs 2 S 3 , CdSAgIAs 2 S 3 , CuAgAsSeTe and TlAgAsIS) were prepared by means of the pulsed laser deposition (PLD) process. The different sensor membranes and structures have been physically characterized by means of Rutherford backscattering spectrometry, scanning electron microscopy and video microscopy. The electrochemical behavior has been investigated by potentiometric measurements.

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“…After these steps, the whole wafer was cut into single chips with a length of 20 mm*10 mm. The fabrication process of the sensor arrays is described in detail in [13].…”

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation

Kloock

Mourzina

Ermolenko

et al. 2004

Sensors

Self Cite

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“…The mixture was then completely dissolved in 5 mL THF [16][17][18][19]. The sensor chips with the thin-film gold substrates were fabricated at Research Centre Jülich as described elsewhere [16,[22][23][24].…”

Section: Micro-fabrication Of the Lead Solid-state Micro-electrodementioning

confidence: 99%

New solid-state organic membrane based leadselective micro-electrode

Arida

Al‐Haddad

Schöning

2011

WIT Transactions on Modelling and Simulation

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Microfabrication, characterization and analytical application of a new thin-film organic membrane based lead-selective micro-electrode have been elaborated. Prior to the fabrication of the assembly, the gold thin-film substrate has been electrochemically treated using a new technique. The developed micro-electrode based on tert-Butylcalix [4]arene-tetrakis(N,N-dimethylthioacetamide) as electroactive sensing material, carboxylated PVC as supporting matrix, 2-nitrophenyl octyl ether as solvent mediator and potassium tetrakiss (4-chlorophenyl) borate as lipophilic additive, respectively, provides a nearly Nernstian response (slope 28±0.5 mV/concentration decade) covering the concentration range 1x10 -6 -1x10 -2 mole L -1 of Pb(II) ions with reasonable selectivity over some tested cations. The merits offered by the new microelectrode include simple fabrication, low cost as well as automation and integration feasibility. Moreover, the suggested microelectrode has been successfully applied for the determination of lead ions in some aqueous samples. These samples were also determined using inductively coupled plasma atomic emission spectroscopy (ICP-AES) for comparison. The proposed electrode offers a good accuracy (the average recovery was 95.5%), high precision (RSD was <3%), fast response time (<30 s.) and long life span (>4 months).

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“…The fabrication process of these chalcogenide glass-based thinfilm microelectrodes is described in detail, e.g. in [13,19].…”

Section: Microfabrication Of the Thin-film Organic/inorganic Sensor Hmentioning

confidence: 99%

“…The up-to-date achievement of the analytical application of modern multisensor arrays including recognition (classification, identification and discrimination) of complex samples, quantitative analysis, process monitoring and taste assessment of foodstuffs have been also reviewed [1 -3]. A significant number of electronic tongues-type sensors based on integrated microelectrodes [4 -6], fluorescent self-assembled monolayers [7], nanostructured thin-films of conducting polymers [8,9], multiple light-addressable potentiometric sensors [10,11], simple unspecific sensors [12] and chalcogenide glass thin-film sensors [13] have been developed. Fabrication, evaluation and application of different electronic noses have been also reported [2,14,15].…”

Section: Introductionmentioning

confidence: 99%

A Novel Thin‐Film Copper Array Based on an Organic/Inorganic Sensor Hybrid: Microfabrication, Potentiometric Characterization, and Flow‐Injection Analysis Application

et al. 2009

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A first step towards the microfabrication of a thin-film array based on an organic/inorganic sensor hybrid has been realized. The inorganic microsensor part incorporates a sensor membrane based on a chalcogenide glass material (CuAg-As-Se) prepared by pulsed laser deposition technique (PLD) combined with an PVC organic membrane-based organic microsensor part that includes an o-xylyene bis(N,N-diisobutyl-dithiocarbamate) ionophore. Both types of materials have been electrochemically evaluated as sensing materials for copper(II) ions. The integrated hybrid sensor array based on these sensing materials provides a linear Nernstian response covering the range 1 Â 10À1 of copper(II) ion concentration with a fast, reliable and reproducible response. The merit offered by the new type of thin-film hybrid array includes the high selectivity feature of the organic membrane-based thin-film microsensor part in addition to the high stability of the inorganic thin-film microsensor part. Moreover, the thin-film sensor hybrid has been successfully applied in flow-injection analysis (FIA) for the determination of copper(II) ions using a miniaturized home-made flow-through cell. Realization of the organic/inorganic thin-film sensor hybrid array facilitates the development of a promising sophisticated electronic tongue for recognition and classification of various liquid media.

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A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

Cited by 34 publications

References 14 publications

Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation

Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation

New solid-state organic membrane based leadselective micro-electrode

A Novel Thin‐Film Copper Array Based on an Organic/Inorganic Sensor Hybrid: Microfabrication, Potentiometric Characterization, and Flow‐Injection Analysis Application

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