2005
DOI: 10.1088/1464-4258/7/6/006
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Thin film metrology using modal wavefront sensing

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Cited by 3 publications
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“…For most applications, the value and dispersion of the refractive index in thin films are also important [6,7]. We know that even for film thicknesses about equal to the wavelength of the probing radiation of the refractometer, the refractive index does not lose its physical meaning.…”
mentioning
confidence: 99%
“…For most applications, the value and dispersion of the refractive index in thin films are also important [6,7]. We know that even for film thicknesses about equal to the wavelength of the probing radiation of the refractometer, the refractive index does not lose its physical meaning.…”
mentioning
confidence: 99%