Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition

Zhang, Hao; He, Dalin; Li, Chunya; Wei, Bin; Zhang, Jianhua

doi:10.1515/nano.11671_2015.207

Cited by 3 publications

(3 citation statements)

References 19 publications

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“…Therefore, ALD has become the best coating tool for protective layers of devices that require high reliability. The water vapor transmission rate (WVTR) is an important indicator for measuring the resistance of the film to water and oxygen, especially for flexible organic light-emitting diode (OLED) displays, which are sensitive to water vapor [ 29 – 37 ]. Its value needs to reach 10 −4 g/m 2 -day or less.…”

Section: Introductionmentioning

confidence: 99%

Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELs

et al. 2021

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In recent years, the process requirements of nano-devices have led to the gradual reduction in the scale of semiconductor devices, and the consequent non-negligible sidewall defects caused by etching. Since plasma-enhanced chemical vapor deposition can no longer provide sufficient step coverage, the characteristics of atomic layer deposition ALD technology are used to solve this problem. ALD utilizes self-limiting interactions between the precursor gas and the substrate surface. When the reactive gas forms a single layer of chemical adsorbed on the substrate surface, no reaction occurs between them and the growth thickness can be controlled. At the Å level, it can provide good step coverage. In this study, recent research on the ALD passivation on micro-light-emitting diodes and vertical cavity surface emitting lasers was reviewed and compared. Several passivation methods were demonstrated to lead to enhanced light efficiency, reduced leakage, and improved reliability.

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Section: Introductionmentioning

confidence: 99%

Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELs

et al. 2021

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“…On-chip solution, also known as "on chip" mode, encapsulates QD onto LED chips to fabricate chip beads [32]. For this kind of methods, a reasonable barrier layer is needed to prevent the small molecules of moisture vapor and oxygen from eroding the surface of QDs [33]- [36], that is, to encapsulate QD materials [37]- [42]. In summary, external encapsulation methods are more feasible and practical to operate in actual applications than internal ones.…”

Section: Introductionmentioning

confidence: 99%

Stacked Encapsulation Structure for Discretely Distributed Quantum Dot Array

Cai

Lin

et al. 2020

IEEE Photonics J.

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The performances of quantum-dot (QD) based photoluminescent devices are highly restricted by the application environment, especially the moisture and oxygen. However, current external encapsulation structures are not applicable to the devices with discrete QD distribution, especially for some rough profiles. To address this issue, an encapsulation method for discretely distributed quantum-dot arrays (DQDA) is proposed for liquid crystal display (LCD) backlight applications, in which the DQDA can be well fabricated by printing the QD slurry onto a light guiding substrate (LGS), and then covered with a thin UV glue layer and a barrier film. By specially optimizing the UV glue and barrier film, this ultra-thin encapsulation structure cannot only improve the surface defects of the QD morphology without affecting the original light path and the output optical performance, but also significantly suppress the fluorescence decay and isolate moisture and oxygen by almost 100 times compared with unencapsulated one. The water vapor transmission rate (WVTR) was measured to be 1.29 × 10 −4 g/m 2 /day after fabricated the stacked encapsulation structure. After a long period of aging test, the encapsulated sample kept its luminance for 1000 hours. This method also has potential to widely used for discrete structures in other device applications due to its easy fabrication process, high reliability, and low manufacturing costs.

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“…The development of high-performance barrier coating has been an interesting subject. This was motivated by the attempts to increase the lifetime of many products such as advanced electronic devices, organic light emitting diodes [1], new generation solar cells (organic photovoltaic, dye sensitised solar cells, perovskite solar cells) [2], and food packaging applications [3]. This is because materials underneath the products are usually sensitive to moisture and oxygen, which can induce some degradation.…”

Section: Introductionmentioning

confidence: 99%

EVA Film Reinforced with Acid Functionalized Graphene Nanoplatelets as a Transparent Barrier Layer to Enhance the Durability of Solar Cells

Yuwawech

Wootthikanokkhan

2019

IJAME

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This research work concerns the development of transparent barrier films based on ethylene vinyl acetate copolymer (EVA) reinforced with the acid functionalized graphene nanoplatelets (GNP). GNP was melt-compounded with EVA in a micro-compounder via two types of mixing schemes. The effect of concentration of GNP on the barrier, thermo-mechanical and optical properties of the EVA composite films were investigated. Water vapour transmission rate of the EVA film decreased by more than 70% after 0.001-0.01 wt% of the GNP was applied. The visible light transmittance in the range of 84-91% was maintained. SEM images showed a random distribution of GNP in the EVA matrix with intimate contact between phases. FTIR spectra imply a polar-polar interaction between the two materials. Tensile toughness of the composite films increased with the concentration of GNP. These demonstrated that the acid functionalized GNP is compatible with EVA. The degree of swelling of the cured EVA films also decreased with the GNP content. The above effects were less obvious when the mixing scheme was changed to the master-batch method. Finally, by applying the EVA/GNP film to encapsulate dye-sensitised solar cells, the lifetime of the device was prolonged by at least three weeks, with the normalised PCE value of 0.74.

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Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition

Cited by 3 publications

References 19 publications

Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELs

Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELs

Stacked Encapsulation Structure for Discretely Distributed Quantum Dot Array

EVA Film Reinforced with Acid Functionalized Graphene Nanoplatelets as a Transparent Barrier Layer to Enhance the Durability of Solar Cells

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