Thin-film elastic-property measurements with laser-ultrasonic SAW spectrometry

Applications of Transient Grating Spectroscopy to Radiation Materials Science

“…22 Hurley et al used SAW spectrometry using separated pump and probe beams to measure the elastic properties of TiN thin films grown on Si, including thickness and Young's modulus. 23 Ruiz and Nagy performed SAW dispersion measurements on surface-treated metals, 24 confirming that SAW spectra can be used to identify the extent of different surface deformation modes, such as surface roughness, compressive residual stress, and cold work. This study points strongly to the possibility that different single effects of radiation damage on microstructure, like those in Ruiz and Nagy's study, should be separable in a very similar way.…”

Morphological, structural, and mechanical characterizations of InGaN thin films deposited by MOCVD

“…Various methods have been developed for measuring the mechanical properties of thin films, such as Brillouin light scattering [7], impulse acoustic method [8], and atomic force microscopy (AFM) [9]. Among these methods, the nanoindentation technique plays a key role in understanding nanomechanical properties of thin films.…”

The theoretical model of fcc ultrathin film

“…/j.ijsolstr.2007 Significant research efforts have been made to investigate the size effects on the elastic properties of ultrathin films including experimental methods and atomistic or molecular dynamics (MD) simulations. Many experimental techniques have been developed to evaluate Young's modulus of thin films, including nanoindentation testing (Ruud et al, 1994;Choi et al, 2003;Son et al, 2003), X-ray diffraction with in situ tensile testing (Villain et al, 2002;Renault et al, 2003) and laser-ultrasonic surface acoustic wave spectrometry (Hurley et al, 2001). Some experiments (Yang et al, 1977;Baral et al, 1985;Renault et al, 2003;Cuenot et al, 2004) show the increase in elastic modulus as the constituent film size decreases while other experiments (Petersen and Guarnieri, 1979;Ruud et al, 1994;Hurley et al, 2001;Villain et al, 2002) show the opposite trend.…”

“…Many experimental techniques have been developed to evaluate Young's modulus of thin films, including nanoindentation testing (Ruud et al, 1994;Choi et al, 2003;Son et al, 2003), X-ray diffraction with in situ tensile testing (Villain et al, 2002;Renault et al, 2003) and laser-ultrasonic surface acoustic wave spectrometry (Hurley et al, 2001). Some experiments (Yang et al, 1977;Baral et al, 1985;Renault et al, 2003;Cuenot et al, 2004) show the increase in elastic modulus as the constituent film size decreases while other experiments (Petersen and Guarnieri, 1979;Ruud et al, 1994;Hurley et al, 2001;Villain et al, 2002) show the opposite trend. In addition to the experimental investigations, MD simulations based on either pair potentials or many body potentials have been carried out to study this size dependence for ultrathin films (Streitz et al, 1990(Streitz et al, , 1994Wolf, 1991;Zhou and Huang, 2004).…”