2015
DOI: 10.1063/1.4905476
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Thickness modulated MoS2 grown by chemical vapor deposition for transparent and flexible electronic devices

Abstract: Two-dimensional (2D) materials have been a great interest as high-performance transparent and flexible electronics due to their high crystallinity in atomic thickness and their potential for variety applications in electronics and optoelectronics. The present study explored the wafer scale production of MoS 2 nanosheets with layer thickness modulation from single to multi-layer by using two-step method of metal deposition and CVD process. The formation of high-quality and layer thickness-modulated MoS 2 film w… Show more

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Cited by 112 publications
(78 citation statements)
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References 36 publications
(33 reference statements)
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“…The thickness of the flakes is determined from the contrast in the optical microscopy images and the energy of the indirect band emission peak in the PL spectra. 19,20 Scanning electron microscopy (SEM) images were taken after all optical characterization, in order to avoid contamination and potential quenching of the MoS 2 photoluminescence. Figure 1 shows optical microscopy and SEM images of one of the flakes investigated in this study.…”
mentioning
confidence: 99%
“…The thickness of the flakes is determined from the contrast in the optical microscopy images and the energy of the indirect band emission peak in the PL spectra. 19,20 Scanning electron microscopy (SEM) images were taken after all optical characterization, in order to avoid contamination and potential quenching of the MoS 2 photoluminescence. Figure 1 shows optical microscopy and SEM images of one of the flakes investigated in this study.…”
mentioning
confidence: 99%
“…Furthermore, we can obtain the VOCl flakes with various thicknesses, ranging from 1.5 nm to 57 nm. Interestingly, the thick samples with large area of around 10 µm × 40 µm can also be obtained in the experiment ( Figure S2), which has been challenging in the synthesis of TMDCs and other 2D materials [38,39]. It should be emphasized that this transfer approach is contamination-free and damage-free, which would be of crucial importance in fabricating high-yield and high-performance electronic and optoelectronic devices.…”
Section: Resultsmentioning
confidence: 99%
“…Another easy technique of growing large‐scale 2D‐TMDs is the “two‐step method.” A transition metal thin film (e.g., Mo, W, and Nb) is deposited on a substrate followed by the thermal reaction with a chalcogen (e.g., S, Se, and Te) vapor in an inert atmosphere at high temperatures of 300–700 °C. This approach has been demonstrated in Figure 10b, where the metals (Mo, W) were coated with controlled thicknesses on substrates and placed in a CVD furnace to react with sulfur powder in an inert environment125 as described below Ms + 2Sg =MS2 s …”
Section: Fundamental Properties Of Tmdsmentioning
confidence: 99%