1995
DOI: 10.1016/0169-4332(95)00014-3
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Thickness determination of uniform overlayers on rough substrates by angle-dependent XPS

Abstract: Angle-dependent XPS thickness determinations of thin overlayers are often based on a simple model assuming a perfectly flat substrate. In this paper we analyze the errors involved in applying this method to uniform overlayers on rough substrates. The analysis is based on an algorithm for simulation of fractional Brownian motion to model substrate roughness and on a Monte Carlo method for electron trajectory simulation. Calculations for a SiO,/Si and Au/Si system show that the errors strongly depend on off-axis… Show more

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Cited by 50 publications
(39 citation statements)
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“…This will give rise to a shadowing effect which depends on the details of the shape and distribution of the aggregates. 10,11 In order to improve the resulting analysis by ARXPS we then tried to minimize the roughness effect in the quantification by normalization of data taken from the same substrate of the respective samples before film growth. These are expected to have similar roughness as the grown film.…”
Section: Analysis Of the Thin Zno Filmsmentioning
confidence: 99%
See 1 more Smart Citation
“…This will give rise to a shadowing effect which depends on the details of the shape and distribution of the aggregates. 10,11 In order to improve the resulting analysis by ARXPS we then tried to minimize the roughness effect in the quantification by normalization of data taken from the same substrate of the respective samples before film growth. These are expected to have similar roughness as the grown film.…”
Section: Analysis Of the Thin Zno Filmsmentioning
confidence: 99%
“…8,9 The problems encountered for rough surfaces has also been the topic of several papers. 10,11 Quantification of surface nano-structures by ARXPS is straightforward for perfectly flat surfaces of amorphous solids where diffraction and forward focusing effects can be neglected.…”
Section: Introductionmentioning
confidence: 99%
“…The most frequently published evidence is associated with XPS and ARXPS, [12][13][14][15][16][17][18][19][20][21][22][23][24][25][26] followed by AES, [27][28][29] REELS, 30,31 and EPES. [32][33][34][35] Below, several examples are mentioned for an illustration.…”
Section: ·1 Experimental Evidencementioning
confidence: 99%
“…Gunter et al [15][16][17] have published a procedure associated with measurements of the overlayer thickness on rough substrates. The authors calculated the overlayer/substrate intensity ratios for corrugated and flat surfaces for a number of overlayer thickness, experimental geometries, and various magnitudes of surface roughness.…”
Section: ·3 Simple Correctionsmentioning
confidence: 99%
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