Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
 2009
DOI: 10.1116/1.3032916
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Thick membrane operated rf microelectromechanical system switch with low actuation voltage

Jong-Seok Kim
1
,
Soon Jae Kwon
2
,
Yongtaek Hong
3
et al.

Abstract: Articles you may be interested inFloating electrode microelectromechanical system capacitive switches: A different actuation mechanism Appl. Phys. Lett. 99, 073501 (2011); 10.1063/1.3624830 Analytical model of the quasistatic mechanical behavior of galvanic piezoelectric microelectromechanical system switches

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