Thermoelectric and Bolometric Infrared Microsensors

Müller, Jürgen; Dillner, U.; Güttich, R.

doi:10.1002/1616-8984(199801)3:1<3::aid-seup3>3.0.co;2-0

Cited by 3 publications

(1 citation statement)

References 28 publications

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“…The radiation enters the sensor via an silicon entrance window [Müller et al 1998]. Owing to the high refractive index of silicon, the real part is about 3.42 in the considered wavelength range from 8 to 14 lm, Fresnel losses of about 30% occur at each surface.…”

Section: Introductionsupporting

confidence: 42%

High temperature resistant antireflective moth-eye structures for infrared radiation sensors

Glaser¹,

Ihring²,

Morgenroth³

et al. 2005

Microsystem Technologies

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The Fresnel reflections occurring at the interfaces of a silicon wafer shall be drastically reduced by reactive ion beam etching of so called moth-eye structures into both surfaces of the wafer. This kind of impedance matching is advantageous to a multilayer interference system when the silicon wafer shall be used as an entrance window for high temperature thermopile infrared radiation sensors and emitters. The transmission was measured to be increased by more then 60%, compared to a polished silicon wafer.

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Section: Introductionsupporting

confidence: 42%

High temperature resistant antireflective moth-eye structures for infrared radiation sensors

Glaser¹,

Ihring²,

Morgenroth³

et al. 2005

Microsystem Technologies

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Spektroskopische Temperaturmessung

Bernhard

2004

Technische Temperaturmessung

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A full optically operated magnetometer array: An experimental study

IJsselsteijn

Kielpinski²,

Woetzel³

et al. 2012

Review of Scientific Instruments

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We show the operation of an optically pumped magnetometer array in a 50 μT magnetic field. The various components for a fully optical and non-magnetic detector unit were constructed and evaluated, from which a prototype unit was assembled with fiber coupled electronics. In this unit the magnetometers were operated using the intensity modulated method and heated with an off-resonant laser. Calculations on the temperature distribution were used to design the magnetometer array. Different magnetometers in such a detector unit were characterized and showed identical performance. Without applying noise reduction schemes, the obtained magnetic field resolution is a factor 2.5 above the shot noise level down to frequencies of about 7 Hz.

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Thermoelectric and Bolometric Infrared Microsensors

Cited by 3 publications

References 28 publications

High temperature resistant antireflective moth-eye structures for infrared radiation sensors

High temperature resistant antireflective moth-eye structures for infrared radiation sensors

Spektroskopische Temperaturmessung

A full optically operated magnetometer array: An experimental study

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